A nanowire biosensor device with front gate regulation and its preparation method

Abstract

The invention discloses a nanowire biosensing device with positive grid regulation and control, and a preparation method of the nanowire biosensing device. The nanowire biosensing device provided by the invention comprises a semiconductor substrate, an isolating layer, an active layer, interlevel dielectric, a contact hole, metal interconnection, a passivation layer, a modifying window, a probe testing window and a back electrode; the modifying window is formed on a nanowire channel, to-be-tested molecules are specifically bonded with -OH groups on the surface of the nanowire channel, and other hydrophobic surfaces, without the -OH groups, in the modifying window are not modified; on the surface of the nanowire channel, the modification density of biomolecules is high, signal intensity is high and perception sensitivity is high; a region which needs to be modified is regulated and controlled completely by defining the position of the modifying window; a positive gate electrode is introduced and proper bias voltage is applied, so that the nanowire channel is positioned in a subthreshold region, the sensitivity is highest and the signal intensity is highest; the preparation method of the nanowire biosensing device is completely compatible with the traditional integrated circuit manufacturing technology and is simple in process and low in cost.

Description

technical field [0001] The invention relates to a biosensor, in particular to a nanowire biosensor device with front gate regulation and a preparation method thereof. Background technique [0002] Since the invention of the integrated circuit, the performance of the chip can be effectively improved by continuously reducing its feature size and integrating other micro-mechanical system components. In recent years, the combination of micro-nano technology and biotechnology has attracted widespread attention from academia and industry. This miniature biosensor is a component that uses biologically active units (such as enzymes, antibodies, nucleic acids, cells, etc.) as sensitive units to convert biological information into electrical signals to monitor biological signals in the environment. Nanowires have a high surface area to volume ratio and meet the sensitivity requirements of biosensing, so they are considered as one of the most promising biosensing devices. [0003] Th...

AI Technical Summary

Problems solved by technology

Traditional nanowire biosensors adopt a back gate structure for channel modulation, because the electric field on the back can only be coupled to the active layer on the front through a thicker dielectric isolation layer (usually silicon dioxide) to affect the regulation of the nanowire. The carrier state in the nanowire is very limited to the modulation of the working state of the nanowire, which cannot meet the requirement that any kind of modified solution nanowire should work in the subthreshold region

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