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Fabrication method of glass-based curved multimode optical waveguide with reduced mode coupling effect

A multi-mode optical waveguide and mode coupling technology, applied in the direction of light guides, optics, optical components, etc., can solve the problems of increasing process difficulty and achieve the effect of reducing process difficulty and equipment requirements

Inactive Publication Date: 2019-05-03
ZHEJIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this solution requires the use of overlay technology, which increases the difficulty of the process

Method used

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  • Fabrication method of glass-based curved multimode optical waveguide with reduced mode coupling effect
  • Fabrication method of glass-based curved multimode optical waveguide with reduced mode coupling effect
  • Fabrication method of glass-based curved multimode optical waveguide with reduced mode coupling effect

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Experimental program
Comparison scheme
Effect test

Embodiment

[0037] Embodiment: Soda-lime-silica glass-based curved multimode optical waveguide manufacturing method:

[0038] Taking the production of a curved multimode optical waveguide with a radius of 5cm (50000μm) and a width of 50μm (that is, the radii of the inner and outer boundaries of the curved waveguide are 49975μm and 50025μm, respectively) as an example, the process of making the optical waveguide is given.

[0039] The manufacturing process of this optical waveguide is divided into the following four steps (such as Figure 4 Shown, divided into A-B, B-C, C-D, D-E).

[0040] Step 1 (A-B), mask making. Prepare and clean the glass substrate 4, and after drying, apply a thermal evaporation process to evenly deposit a layer of aluminum film with a thickness of about 200nm-300nm, and use standard microfabrication techniques (photolithography, corrosion and degumming, etc.) A mask is formed on the substrate 4 . The mask includes two parts: a mask part 7 on the side close to the...

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Abstract

The invention discloses a glass-based bent multimode optical waveguide manufacturing method capable of reducing the mode coupling effect. The method includes the steps that a mask of a bent strip waveguide is manufactured on a glass substrate, wherein the width of the mask portion close to the curvature center side is larger than that of the mask portion away from the curvature center side; the glass substrate with the mask is put into molten potassium nitrate for heat preservation, and finally a potassium ion dissipation area is formed on the surface of the glass substrate; the mask portion close to the curvature center side and the mask portion away from the curvature center side are removed; the glass substrate is put into molten sodium nitrate and silver nitrate mixed salt for Ag+-Na+ ion exchange. By means of the method, the asymmetric optical waveguide can be manufactured just by conducting the photoetching ion mask glass-based optical waveguide manufacturing technology once, the requirement for equipment is greatly lowered, and the technological difficulty is effectively lowered.

Description

technical field [0001] The invention relates to a method for manufacturing a curved multi-mode optical waveguide on a glass substrate, in particular to a method for manufacturing a glass-based curved multi-mode optical waveguide with reduced mode coupling effect. Background technique [0002] With the rapid development of the mobile Internet, the traditional electrical interconnection transmission based on copper wires is gradually unable to meet the growing demand for bandwidth, and the development of optical interconnection has become an inevitable trend of technological progress. Compared with electrical interconnection, optical interconnection technology has the advantages of anti-electromagnetic interference, low loss, large bandwidth, and low cost, and provides a new solution for solving the bandwidth bottleneck of electrical interconnection. At present, optical interconnection has become a new research hotspot that researchers pay attention to. [0003] Bending waveg...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/134
CPCG02B6/134
Inventor 郝寅雷冯泽明丁君珂余辉李宇波周强江晓清杨建义
Owner ZHEJIANG UNIV
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