Multispectral interferometer based on concentric spherical focusing elements

Abstract

The invention discloses a multi-spectral interferometer based on concentric ball focusing elements, belongs to the field of optical measurement, and solves the problem that an existing interferometer can only provide one type of measurement channel. Included is a front interference imaging system. The system consists of a complex light source and an interferometer optical system. In the interferometer, the light emitted by the complex light source is incident on a beam expander, the light emitted after the beam expansion is incident on a first light splitting plate, the light is reflected by the first light splitting plate and collimated by a collimating lens into parallel beams, and the parallel beams are incident vertically on a standard flat crystal and an object to be measured in sequence; and the light is reflected by the standard flat crystal and the object to be measured, the reflected light is transmitted through the first light splitting plate to a second light splitting plate and enters into the collimating lens through the second light splitting plate to exit as parallel light, the parallel light is then subjected to a splitting grating to split polychromatic light into light of different spectral bands, and the light of different spectral bands is focused on a relay imaging system through concentric ball focusing elements for interference imaging detection and analysis by a CMOS detector. The multi-spectral interferometer of the invention has the characteristics of common optical path and multiple optical axes, and realizes multi-spectral interference detection.

Description

technical field [0001] The invention provides a multispectral interferometer based on a concentric spherical focusing element, which belongs to the field of optical measurement. Background technique [0002] With the continuous deepening of people's research on interferometric technology, multispectral interferometers are widely used in military and civilian fields. Therefore, how to quickly and accurately obtain multiple interference images of different spectral bands is very important for the research of interference imaging technology. At present, optical interference detection technology is a metrology test method based on the principle of light wave interference, and is recognized as one of the most effective and accurate means for detecting optical components and optical systems. The interferometer adopts interference detection technology to realize non-contact measurement at the wavelength level, and has higher sensitivity and better usability than other types of det...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problem that the existing interferometer can only provide one measurement channel, the present invention provides a multi-spectral interferometer based on concentric spherical focusing elements, which solves the real-time, fast and accurate use requirements of modern multi-spectral interference detection, and can Multi-channel real-time detection of multi-wavelength coherent light in the same field of view

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