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Transportation cradle and transportation method

A frame and side technology, applied in the field of conveying stents and conveying, to achieve the effect of easy conveying

Active Publication Date: 2017-08-29
TOKYO ELECTRON LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the device becomes large, it is difficult to transport one device as it is due to the size and weight

Method used

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  • Transportation cradle and transportation method
  • Transportation cradle and transportation method
  • Transportation cradle and transportation method

Examples

Experimental program
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Embodiment Construction

[0028] In one embodiment, the transport rack of the present invention is a transport rack for transporting vertically separable chambers, comprising: a central frame extending along the first direction; two side frames, Its two ends in the first direction of the central frame extend along the second direction intersecting with the first direction; a plurality of fixing pieces are used for fixing the chamber to the central frame. The chamber can be divided into an upper part comprising the top surface of the chamber and a lower part comprising the bottom surface of the chamber. The plurality of fasteners respectively fix at least one of the upper component and the lower component to the side surface of the center frame between the two side frames so that the top surface or the bottom surface is oriented along the side surface of the center frame.

[0029] In addition, in one embodiment of the carrier for transportation according to the present invention, a plurality of fixers m...

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Abstract

The present invention provides a transportation cradle and a transportation method which easily transports a chamber. The transportation cradle (10) to transport the chamber which is able to vertically be divided comprises: a center frame (20) extended in a first direction; two side frames (30) extended in a second direction crossing the first direction on both ends of a center frame (20) in the first direction; and a plurality of installation plates (24) to fixate the chamber to the center frame (20). The chamber is divided into an upper component (71) including a ceiling surface (710) of the chamber, and a lower component (72) including a bottom (720) of the chamber. Each of the plurality of installation plates (24) fixates at least one among the upper component (71) and the lower component (72) onto a side of the center frame (20) between the two side frames in order for the ceiling surface (710) or a bottom (720) to be arranged along the side of the center frame (20).

Description

technical field [0001] Various technical solutions and embodiments of the present invention relate to delivery stents and delivery methods. Background technique [0002] The larger the size of the mother glass substrate of the flat panel display substrate, the greater the number of panels that can be obtained from one mother glass substrate, and thus the cost can be reduced. Therefore, in recent years, mother glass substrates have been increasing in size. In addition, along with the increase in the size of mother glass substrates, devices for manufacturing glass substrates and inspecting glass substrates are also increasing in size. [0003] However, after an apparatus for manufacturing a flat panel display substrate or the like is manufactured by a manufacturer, it is transported and installed at a production site. However, when the device becomes large, it is difficult to transport one device as it is due to the size and weight. [0004] Therefore, there is known a tech...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G49/06
CPCB65G49/063B60P7/06B60P7/08B60P7/135B60R3/007
Inventor 大上胜行酒井伸一
Owner TOKYO ELECTRON LTD