Mems three-dimensional co-vibration vector hydrophone based on piezoresistive effect

Abstract

The invention discloses a piezoresistive effect based MEMS three-dimensional co-oscillating vector hydrophone, which comprises a co-oscillating cylindrical oscillator module used for detecting acoustic signals from the horizontal direction and a co-oscillating spherical oscillator module used for detecting acoustic signals from the vertical direction, and is characterized in that the co-oscillating cylindrical oscillator module mainly comprises a frame-shaped base, cross beams, a central connector, a cylindrical polyethylene oscillation pickup unit and piezoresistors; and the co-oscillating spherical oscillator module mainly comprises a frame-shaped base, cross beams, an annular connector, a spherical polyethylene oscillation pickup unit and piezoresistors. The piezoresistive effect based MEMS three-dimensional co-oscillating vector hydrophone is reasonable in design. The piezoresistive effect based MEMS three-dimensional co-oscillating vector hydrophone, which performs common-mode output and differential-mode suppression and is high in sensitivity and wide in working band, is designed by starting from the theory. Compared with the prior art, the piezoresistive effect based MEMS three-dimensional co-oscillating vector hydrophone adopts a micro-nano machining technology, and miniaturization of the three-dimensional co-oscillating vector hydrophone is realized.

Description

technical field [0001] The invention relates to a vector hydrophone in the field of MEMS sensors, in particular to a piezoresistive effect-based MEMS three-dimensional co-vibration vector hydrophone. Background technique [0002] At present, the vector hydrophones developed at home and abroad are generally divided into two categories: co-vibration type and differential pressure type. For the differential pressure vector hydrophone, because the depth of the "8" cosine directivity pit is too shallow, the pointing accuracy is not high, which limits its application in the field of underwater acoustics. For the co-vibration vector hydrophone, according to the different sound wave receiving theories of the particle velocity hydrophone, the co-vibration vector hydrophone can be divided into the co-vibration cylindrical oscillator vector hydrophone and the co-vibration spherical oscillator vector hydrophone device. Conventional co-vibration vector hydrophones must be fixed on a ri...

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Problems solved by technology

[0003] The present invention aims to solve the problem of poor anti-flow noise performance, low sensitivity, poor impact resistance performance, high quality, mismatch between acoustic impedance and water, and complicated processing of the vector underwater acoustic sensor brought about by conventional design and processing technology and other technical solutions. At the same time, in order to solve the problems that the existing three-dimensional MEMS vector hydrophone is difficult to install and the vertical sound signal is difficult to detect, a MEMS three-dimensional co-vibration vector hydrophone based on the piezoresistive effect is provided.

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