Scanning system

A scanning system and scanning-driven technology, applied in the field of scanning systems, can solve the problems of missing scanning, inability to meet scanning accuracy requirements, and inaccurate scanning results, and achieve the effect of accurate scanning results

Inactive Publication Date: 2017-12-01
YANGTZE MEMORY TECH CO LTD
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Problems solved by technology

[0004] However, the above-mentioned scanning method is not suitable for scanning a circular sample to be measured. This scanning method can only obtain a straight line scanning trajectory, which often results in inaccurate scan results due to the lack of scanning of certain points on the circumference of the sample to be measured. Can not meet the accuracy requirements required for scanning

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Embodiment Construction

[0039] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0040] Due to the single probe in the AFM system in the prior art, the sample to be tested is scanned by a progressive breakpoint scanning method. The scanning track of this line-by-line breakpoint scanning mode is generally a straight line, which is suitable for scanning square measured samples. However, the above-mentioned scanning method in t...

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Abstract

The invention provides a scanning system which comprises at least one probe, at least one scanning driving device and a rotating device, wherein the number of the probes is identical to that of the scanning driving devices; and one probe is mounted on one scanning driving device. Within a scanning cycle, the positions of the probes are controlled unchanged by the scanning driving devices, a tested sample is scanned by the probes according to the driving frequencies of the scanning driving devices, and the tested sample is rotated through the rotating device, so that a circular scanning track is obtained when a circular tested sample is scanned by using the scanning system. Therefore, a scanning system capable of providing a circular scanning track is provided, important points representing morphology of a circular tested sample are not omitted when the circular tested sample is scanned, and an accurate scanning result of the circular tested sample is acquired.

Description

technical field [0001] The invention relates to the field of materials, in particular to a scanning system. Background technique [0002] At present, in the field of materials, Atomic Force Microscope (AFM) is often used to scan the surface structure of the sample to be tested, and because AFM scanning can obtain high-resolution surface structure, therefore, AFM is often used for precision materials. to scan. For example, in the process of manufacturing a chip, AFM is often used to scan the chip surface to obtain a high-resolution chip surface structure. [0003] In the prior art, the AFM system uses a single probe to scan the surface of the sample to be measured in a line-by-line breakpoint scanning manner. When the measured sample is scanned in this line-by-line breakpoint scanning mode, the obtained scanning track is generally a straight line, which is suitable for scanning square measured samples. [0004] However, the above-mentioned scanning method is not suitable f...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/952
CPCG01N21/952
Inventor 陈子琪
Owner YANGTZE MEMORY TECH CO LTD
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