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A monitoring method, microelectronic processing method and device

Active Publication Date: 2020-03-31
BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, during the monitoring process, due to the physical characteristics of the power supply itself, that is, there is a large inrush current every time the power is loaded, causing false alarms

Method used

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  • A monitoring method, microelectronic processing method and device
  • A monitoring method, microelectronic processing method and device
  • A monitoring method, microelectronic processing method and device

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Embodiment Construction

[0033] In order to enable those skilled in the art to better understand the technical solution of the present invention, the monitoring method, microelectronic processing method and equipment provided by the present invention will be described in detail below with reference to the accompanying drawings.

[0034] In microelectronic processing equipment, heating components such as heating lamps, heating tubes and / or susceptors are used to heat workpieces to be processed to meet the conditions for implementing the process. However, the heating capacity of the heating component will decrease with the increase of the use time. In order to avoid the reduction of the heating capacity and affect the processing technology, it is necessary to monitor the heating capacity of the heating component in real time during the microelectronics processing, so as to maintain and calibrate the heating capacity of the heating component in time. heating capacity.

[0035]The monitoring process of th...

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Abstract

The invention provides a monitoring method and a microelectronic processing method and device. The monitoring method is used to monitor the heating capability of a heating component. The monitoring method comprises the steps that S1 the output current value of the heating component at the current output power percentage is collected; S2 whether the output current value changes is determined; S3 whether the number of changes of the output current value at the current output power percentage exceeds a preset number of changes is determined; S4 a standard current value at the current output powerpercentage is acquired; S5 the difference between the output current value at the current output power percentage and the standard current value is calculated; S6 whether the difference exceeds a preset current tolerance range is determined; and S7 an alarm is thrown. The microelectronic processing method can avoid a false alarm caused by impact current when power loading is carried out.

Description

technical field [0001] The invention belongs to the technical field of microelectronics, and relates to a microelectronic processing method and device. Background technique [0002] In the process of processing integrated circuits, LEDs, photovoltaics, and flat panel displays, there are many processes that require heating the workpiece to a certain temperature. For example, in order to remove impurities such as water and organic matter on the surface of the workpiece, it is necessary to put the workpiece into a degassing (Degas) chamber and heat it to a certain temperature. At present, there are three main heating components used: lamp tube, bulb and base. During use, the heating capacity of the heating element will decrease over time. Therefore, it is necessary to monitor the heating capacity of the heating element. [0003] Since the voltage applied to both ends of the heating element is constant, the more common monitoring method is to monitor the output current value o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05K13/08
Inventor 苏运坤
Owner BEIJING NAURA MICROELECTRONICS EQUIP CO LTD