Exhaust valve assembly for soft roasting equipment

Abstract

The invention provides an exhaust valve assembly of soft baking equipment. The exhaust valve assembly comprises an exhaust pipe, a first valve and a first drive, wherein the first valve penetrates through the exhaust pipe on the cross section of the exhaust pipe; the first drive is used for driving the first valve to move relative to the exhaust pipe; the first valve comprises a pair of baffles, amain body and a pair of sliding rails; and the pair of baffles penetrate through the exhaust pipe and are fixed to the exhaust pipe, the pair of sliding rails are fixedly arranged at the opposite twosides of the main body, the pair of sliding rails are separately in sliding contact with the pair of baffles, and the main body and the pair of sliding rails are driven to slide relative to the pairof baffles through the first drive so as to realize the opening and closing of a pipeline. The device provided by the invention can reduce the friction of the valve in stretching and retracting processes and thoroughly solve the alarm problem of the exhaust high-pressure valve during soft baking.

Description

technical field [0001] The invention belongs to the field of flat panel display manufacturing, and in particular relates to an exhaust valve assembly of soft baking equipment. Background technique [0002] The photolithography process is one of the most important process steps in semiconductor manufacturing, and its main function is to copy the pattern on the mask plate to the silicon wafer. The main process of the photolithography process includes: surface cleaning and drying, primer coating, photoresist spin coating, soft baking, alignment exposure, post-baking, developing, hard baking, etching, testing and other processes. The soft baking can remove the solvent, enhance the adhesion, release the stress in the photoresist film, and prevent the photoresist from polluting the equipment. The soft baking process plays an important role in the entire photolithography process. But in the prior art, the exhaust device will send out the alarm that the switch of the high-pressure ...

AI Technical Summary

Problems solved by technology

However, in the prior art, during soft roasting, the exhaust device will issue an alarm of abnormal high-pressure exhaust valve switch every once in a while.

This is due to the frequent opening and closing of the soft-bake high-pressure exhaust valve during the continuous preparation process. During the switching process, the valve will slide relative to the rubber pad at the lower part of the exhaust pipe to generate greater friction. Valve offset, causing the exhaust valve to close and open for extended periods of time, eventually causing the exhaust to sound an alarm

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