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Array light source lighting device for exposure machine

A technology of array light sources and lighting devices, which is applied to lighting devices, components of lighting devices, and damage prevention measures for lighting devices. Homogenizing effect shortening, shortening the length of the effect

Pending Publication Date: 2018-02-23
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Mercury lamps consume a lot of power, and their wavelengths include infrared bands and their own low efficiency will generate a lot of heat.
Mercury is toxic, and short-wavelength ultraviolet radiation can produce ozone, which is inconsistent with today's environmental protection concepts

Method used

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  • Array light source lighting device for exposure machine
  • Array light source lighting device for exposure machine
  • Array light source lighting device for exposure machine

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0021] The present invention will be described in further detail below through specific examples.

[0022] like Figure 1 to Figure 4 As shown, an array light source lighting device for an exposure machine includes an LED light source 1, and the LED light source 1 includes a fixed base plate 11 and a plurality of LED lamp beads 122 assemblies 12, and the LED lamp beads 122 assemblies 12 are arrayed in a two-dimensional equidistant manner Installed on the substrate 121, the LED lamp bead 122 assembly 12 includes the substrate 121, the LED lamp bead 122 fixed on the substrate 121 and the lampshade lens 123, the lampshade lens 123 covers the entire LED lamp bead 122, and the lampshade lens 123 It includes a collimating lens 1231 and a collecting lens 1236 that are detachably fixed by a fixed structure. The collimating lens 1231 is flared, and the collecting lens 1236 is arranged on the light-emitting side of the collimating lens 1231. The LED lamp bead 122 assembly 12 A focusing...

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PUM

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Abstract

The invention discloses an array light source lighting device for an exposure machine. The array light source lighting device comprises an LED light source. The LED light source comprises a fixed bottom plate and a lamp bead assembly. The LED lamp bead assembly comprises a base plate, an LED lamp bead fixed to the base plate, and a lampshade lens. The lampshade lens comprises a collimating lens and a collection lens which are fixed detachably through a fixing structure. The collection lens is arranged on the light outlet side of the collimating lens. A focusing lens, a light-homogenized rod, arate magnifying lens set and an exposure receiving face are arranged in front of the LED lamp bead assembly sequentially. The focusing lens focuses light to the incidence end face of the light-homogenized rod. The light-homogenized rod is a conical light-homogenized rod. The area of the incidence end face of the light-homogenized rod is larger than that of the outgoing end face. The rate magnifying lens set magnifies light rays emitted by the outgoing end face of the light-homogenized rod, and then an image is formed on the exposure receiving face. According to the array light source lightingdevice, the LED array light source is used for the exposure machine, an exposure face with uniform light spots can be provided, the structure is more compact, and cost is lower.

Description

technical field [0001] The invention relates to an array light source lighting device, in particular to an array light source lighting device used in an exposure machine. Background technique [0002] The light source in the technical field of exposure machines is generally a traditional mercury lamp, but the mercury lamp has many shortcomings. Mercury lamps need to be preheated to start. Mercury lamps have a short lifespan, generally only about 1000 hours. Mercury lamps consume a lot of power, and their wavelengths include infrared bands and their own low efficiency will generate a lot of heat. Mercury is toxic, and short-wavelength ultraviolet radiation can produce ozone, which is inconsistent with today's environmental protection concepts. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide an array light source lighting device for an exposure machine. The array light source lighting device uses an LED array li...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F21K9/20F21V19/00F21V5/04F21V15/02F21V17/12F21Y115/10
CPCF21K9/20F21V5/04F21V15/02F21V17/12F21V19/001F21Y2115/10
Inventor 欧高焓孙秀辉尹韶云
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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