Capacitive coupling plasma diagnosis apparatus and diagnosis method
A plasma and capacitive coupling technology, applied in the direction of plasma, electrical components, etc., can solve the problems of unable to monitor and observe the discharge state, large interference of discharge electrodes, and relatively large limitations of diagnostic methods, so as to achieve the discharge effect conveniently and avoid Interfering, easy-to-use effects
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[0043] The following describes the present invention in detail with reference to the drawings and specific embodiments.
[0044] A capacitively coupled plasma diagnostic device, including a radio frequency power supply 1, a radio frequency power supply 1, a matching device 2, an oscilloscope 3, a high voltage probe 4, a current loop 5, a wire 6, a fixed bracket 7, a discharge electrode 8, a glass medium 9, and a glass cavity Body 10, circular base 11, gas cylinder 12, vacuum gauge 13, vacuum pump 14, three-way valve 15, fine-tuning valve 16, air pipe 17, water cooler 18, water pipe 19, gas filling port, and exhaust port 21.
[0045] The radio frequency power supply 1 and the radio frequency power supply 1 matcher 2 connected in series supply power to the discharge electrode 8 through the wire 6.
[0046] The oscilloscope 3 is connected to the discharge electrode 8 through the high-voltage probe 4 and the current loop 5.
[0047] The water cooler 18 is connected to the radio frequency ...
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