The invention provides an electromagnetic-driving electromagnetic-detection triaxial microgyroscope with
bulk acoustic wave resonance, and a preparation method thereof. The microgyroscope comprises a release-hole-free disk oscillator, a cylindrical support pillar, a baseplate,
electromagnetic drive coils, electromagnetic detecting coils and isolating electrodes, wherein the disk oscillator is fixed on the baseplate through the cylindrical support pillar and is perpendicular to the Z-axis of the baseplate; the
electromagnetic drive coils, the electromagnetic detecting coils and the isolating electrodes are circumferentially distributed on the baseplate, positioned below the disk oscillator and parallel to the disk oscillator, and gaps are reserved between the disk oscillator and the
electromagnetic drive coils, the electromagnetic detecting coils and the isolating electrodes; the isolating electrodes are distributed between the electromagnetic drive coils and the electromagnetic detecting coils. According to the invention, a non-contact driving detection
electrode is adopted to perform driving detection on the
gyroscope, and thus external influence on the
harmonic oscillator is alleviated. The microgyroscope adopts an MEMS
processing technique, is simple in manufacturing process and high in reliability, and ensures low cost and high yield. Moreover, the microgyroscope has the advantages of small size, simple structure, easiness in realization of
processing technique and suitability for
batch production.