Electromagnetic-driving electromagnetic-detection triaxial microgyroscope with bulk acoustic wave resonance, and preparation method thereof

Abstract

The invention provides an electromagnetic-driving electromagnetic-detection triaxial microgyroscope with bulk acoustic wave resonance, and a preparation method thereof. The microgyroscope comprises a release-hole-free disk oscillator, a cylindrical support pillar, a baseplate, electromagnetic drive coils, electromagnetic detecting coils and isolating electrodes, wherein the disk oscillator is fixed on the baseplate through the cylindrical support pillar and is perpendicular to the Z-axis of the baseplate; the electromagnetic drive coils, the electromagnetic detecting coils and the isolating electrodes are circumferentially distributed on the baseplate, positioned below the disk oscillator and parallel to the disk oscillator, and gaps are reserved between the disk oscillator and the electromagnetic drive coils, the electromagnetic detecting coils and the isolating electrodes; the isolating electrodes are distributed between the electromagnetic drive coils and the electromagnetic detecting coils. According to the invention, a non-contact driving detection electrode is adopted to perform driving detection on the gyroscope, and thus external influence on the harmonic oscillator is alleviated. The microgyroscope adopts an MEMS processing technique, is simple in manufacturing process and high in reliability, and ensures low cost and high yield. Moreover, the microgyroscope has the advantages of small size, simple structure, easiness in realization of processing technique and suitability for batch production.

Description

technical field [0001] The invention relates to a micro-gyroscope in the field of micro-electromechanical technology, in particular to a three-axis micro-gyroscope with a disk-shaped resonator utilizing a bulk acoustic wave saddle resonance mode and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, high reliability, and adaptability to various harsh environments. [0003] After searching the literature of the existing technology, it was found that the Chinese patent "Double-axis MEMS gyroscope" (patent application number: 201020033300.7) us...

AI Technical Summary

Problems solved by technology

[0004] This technology has the following disadvantages: the gyroscope adopts the traditional spring-mass structure model, the signal sensitivity obtained is not high, the Q value is low, the zero drift is too large, and the impact resistance is poor

This contact will undoubtedly have a certain impact on the performance of the device, and will undoubtedly greatly increase the processing complexity

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