The embodiment of the invention discloses an
ultraviolet ultrafast
laser telecentric lens group and
laser processing equipment, the
ultraviolet ultrafast
laser telecentric lens group comprises a first lens, a second lens, a third lens, a fourth lens and a fifth lens which are sequentially arranged along the incident direction of light, the first lens is a biconvex positive lens, the second lens is a biconcave negative lens, and the fifth lens is a biconvex negative lens. The third lens is a negative
meniscus lens, the fourth lens is a positive
meniscus lens, and the fifth lens is a biconvex positive lens. According to the
ultraviolet ultrafast laser
telecentric lens group, an
exit pupil is located at the infinite position of an image space, main light rays of a focused
light beam are perpendicular to a focal plane under the condition of any
full field angle, perforation inclination is avoided,
astigmatism and
distortion of the laser telecentric lens group are effectively corrected, an image space telecentric light path is achieved, and the
imaging quality is improved. In addition, the lens is simple in structure and convenient to design, and can be widely applied to various fine
laser processing devices.