Electromagnetic-drive electrostatic-detection bulk acoustic wave harmonic-vibration triaxial microgyroscope and preparation method thereof

Abstract

The invention relates to an electromagnetic-drive electrostatic-detection bulk acoustic wave harmonic-vibration triaxial microgyroscope and a preparation method thereof. The microgyroscope comprises a disk vibrator without a release hole, a cylindrical support column, an electromagnetic drive coil which is distributed on the substrate and has a certain gap with harmonic vibrator, a detection electrode and a common electrode. By adopting an MEMS (micro-electromechanical systems) processing technique, the manufacturing method has the advantages of simple manufacturing technique and high reliability, and can ensure lower cost and higher yield. The microgyroscope is subjected to drive detection by using the non-contact drive detection electrode, thereby reducing the influence on the harmonic vibrator by the outside. The microgyroscope has the advantages of small size, simple structure and shock resistance, and does not need vacuum encapsulation; and the processing technique is easy to implement, is compatible with a CMOS (complementary metal oxide semiconductor) technique, and is suitable for mass production.

Description

technical field [0001] The present invention relates to a micro-gyroscope in the field of micro-electromechanical technology, in particular to an electromagnetically driven electrostatic detection body acoustic wave resonant three-axis micro-gyroscope and a preparation method thereof. Background technique [0002] Gyroscope is an inertial device that can be sensitive to the angle or angular velocity of the carrier, and it plays a very important role in the fields of attitude control, navigation and positioning. With the development of national defense technology and aviation and aerospace industries, the requirements of inertial navigation systems for gyroscopes are also developing in the direction of low cost, small size, high precision, high reliability, and adaptability to various harsh environments. [0003] After searching the literature of the existing technology, it was found that the Chinese patent "Double-axis MEMS gyroscope" (patent application number: 201020033300...

AI Technical Summary

Problems solved by technology

[0004] This technology has the following disadvantages: the gyroscope adopts the traditional spring-mass structure model, the signal sensitivity obtained is not high, the Q value is low, the zero drift is too large, and the impact resistance is poor

This contact will undoubtedly have a certain impact on the performance of the device, and will undoubtedly greatly increase the processing complexity

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