Design method of electrostatic negative stiffness accelerometer

An accelerometer and design method technology, applied in the direction of speed/acceleration/shock measurement, acceleration measurement, calculation, etc., to achieve the effect of improving the overall quality factor, improving the limit resolution, improving the robustness and long-term stability

Active Publication Date: 2018-12-21
SUZHOU GST INFOMATION TECH CO LTD
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Problems solved by technology

But at present, for the design and production of this kind of electrostatic negative stiffness accelerometer, there is no systematic and optimized design method and design idea, and there is still a lot of room for improvement in this kind of products.

Method used

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  • Design method of electrostatic negative stiffness accelerometer
  • Design method of electrostatic negative stiffness accelerometer
  • Design method of electrostatic negative stiffness accelerometer

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Embodiment Construction

[0074] Such as Figure 1 ~ Figure 4 As shown, the present invention discloses a kind of design method of electrostatic negative stiffness type accelerometer, specifically comprises the following steps:

[0075] S1. Study the working mechanism of the electrostatic negative stiffness accelerometer, establish the interface electromechanical model of this type of accelerometer, and convert the interface electromechanical model into a coordinate system equation, that is, symmetrically design a high Q value double-ended "I" type mass.

[0076] Specifically, it includes the following steps:

[0077] S11. Establish the interface capacitance model, and obtain the expression formula of the capacitance of a single comb tooth according to the model,

[0078]

[0079] Such as figure 2 Shown, where, ε is the vacuum permittivity, l 0 is the overlapping length of the capacitor plates, t is the transverse thickness of the comb teeth, and d is the longitudinal distance between the comb t...

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Abstract

The invention discloses a design method of an electrostatic negative stiffness accelerometer. The method is characterized by comprising the steps that S1, an interface electromechanical model of the electrostatic negative stiffness accelerometer is established, and the interface electromechanical model is converted into a coordinate system equation; S2, by calculating electrostatic force of a combtooth capacitor, the position length and symmetric design of a driver and driven detection comb teeth are determined; S3, according to the electrostatic force feedback principle, planning design is performed on the size and spacing of embedded detection comb tooth electrodes; and S4, according to the principle of the acceleration and electrostatic negative stiffness effect in the accelerometer based on electrostatic negative stiffness regulation, a relational expression influencing acceleration finally is obtained. The design method of the high-performance FM accelerometer based on electrostatic negative stiffness regulation is good in use effect and has quite high application and popularization value.

Description

technical field [0001] The invention relates to a design method, in particular to a design method of a high-performance FM accelerometer based on electrostatic negative stiffness adjustment, and belongs to the field of high-performance sensor design. Background technique [0002] Micro-electromechanical (MEMS) accelerometer is a kind of inertial device manufactured by micro-machining technology. Compared with traditional accelerometers, it has the characteristics of small size, light weight, low power consumption and low cost. Today, silicon microcapacitive accelerometers based on detection capacitance technology have been widely used in the field of consumer electronics. However, in key occasions such as positioning and navigation that require high precision, it is still necessary to further improve the sensor performance from the current level. [0003] In order to enable the accelerometer to be used in these navigation-level applications, the zero-bias instability of the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/125G06F17/50
CPCG01P15/125G06F30/367
Inventor 苏岩刘梦祥王亚刚赵健
Owner SUZHOU GST INFOMATION TECH CO LTD
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