Micro pressure sensor

Abstract

The invention discloses a micro pressure sensor, comprising an upper conductive electrode, a sensing medium layer and a lower conductive electrode, wherein the upper conductive electrode and the lowerconductive electrode are respectively connected with the upper surface and the lower surface of the sensing medium layer through a first conductive adhesive layer and a second conductive adhesive layer, the sensing medium layer comprises a foamed polyurethane body and an inductive coating layer filled in the surface and pores of the foamed polyurethane body, and the inductive coating layer is composed of the following components: 100 parts of silver nano-conductor aqueous dispersion, 3-5 parts of water-based acrylic resin, alcohol solvent, ketone solvent, 0.4-0.6 parts of polyvinylpyrrolidone, 0.2-0.5 parts of alkylphenol ethoxylate, polyethylene glycol p-isooctyl phenyl ether, bismuth octylate, and toluene diisocyanate. The micro pressure sensor provided by the invention can be bent to be resistant to bend, can sense small pressure, and still has high sensitivity under high pressure. Furthermore, the detection data is stable, and the detection precision is reproducible.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a micro pressure sensor. Background technique [0002] Pressure sensors can be divided into piezoelectric sensors based on piezoelectric materials and piezoresistive sensors based on piezoresistive materials according to materials. Piezoelectric sensors made of piezoelectric ceramics, piezoelectric crystals, piezoelectric electrets, and organic piezoelectric films as sensitive elements generate transferable charges on the surface of the material when they are under pressure, and the voltage when the charges pass through the detection device Can directly reflect the size of the pressure. The piezoresistive sensor with alloy sensitive gate, semiconductor and other materials as sensitive elements deforms when it is under pressure, and the deformation causes the resistance of the sensitive element to change. By detecting the change in the resistance of the sensitive element through ...

AI Technical Summary

Problems solved by technology

[0003] Existing pressure sensors are often not resistant to bending, and the sensitivity is not enough. The error of measuring pressure with the sensor of pressure-sensitive material will reach about 20%, and the measurement accuracy is poor. How to overcome the above technical problems and improve them has become an effort for those skilled in the art. direction

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