Method and device for measuring center thickness of post-pupil laser differential confocal lens

A differential confocal and lens center technology, applied in measuring devices, optical devices, instruments, etc., can solve problems such as unsatisfactory high-precision testing of spherical lens center thickness, achieve high-precision calculations, reduce measurement errors, and improve The effect of measurement accuracy
CN109186477BActive Publication Date: 2020-05-12BEIJING INSTITUTE OF TECHNOLOGYGY
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
BEIJING INSTITUTE OF TECHNOLOGYGY
Publication Date
2020-05-12

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Abstract

The invention relates to a measurement method and a device for lens center thickness based on a rear spectral pupil laser differential confocal technology, and belongs to the technical field of optical precision measurement. The method performs precise focusing of apexes of the front and back surfaces of a measured lens by using the absolute zero point of the differential confocal response curve,and calculates the center thickness of the measured lens by using ray tracing and a compensation model thereof. According to the invention, the rear spectral pupil laser differential confocal technology is used for high-precision detection of the lens center thickness for the first time, the differential confocal focusing and measurement of lens center thickness can be realized by only one detector, so that the decrease of focusing precision which may be caused by replacing the measured lens is avoided, and the measurement precision is improved; laser differential confocal focusing technologyand ray tracing technology are organically integrated, and the ray tracing and the compensation model thereof are established to eliminate influences between parameters of each focusing surface; and rapid triggering focusing is achieved by linearly fitting the data near the absolute zero point, so that the measurement speed, the precision, and the anti-scatter capability are greatly improved.
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Description

technical field

[0001] The invention relates to a method and a device for measuring the center thickness of a post-divided pupil laser differential confocal lens, which can be used for non-contact high-precision measurement of the lens center thickness and belongs to the technical field of optical precision measurement. Background technique

[0002] In the field of optics, the measurement of lens center thickness is of great significance. Lens center thickness is an important parameter in the optical system, and its processing quality will have a great impact on the imaging quality of the optical system. Especially for lenses in high-performance optical systems such as lithography machine objective lenses and aerospace cameras, it is necessary to precisely adjust the axial gap, radial offset and optical axis deflection angle of the lens according to the curvature radius, refractive index and central thickness of the lens in the lens. adjustment. Taking the objective lens o...

Claims

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