Building-block fast finite element simulation method and system for finite-length micro-acoustic devices

Abstract

The invention provides a building block type fast finite element simulation method and system for a finite-length microacoustic device, comprising the following steps of obtaining a physical model ofthe microacoustic device; identifying and grouping the physical models of microacoustic devices, and grouping the parts with the same characteristics into one group; segmenting the feature sub-units in each group; selecting any characteristic subelement of each component to establish finite element model for finite element calculation, and obtaining the finite element calculation results of the selected characteristic subelement; substituting the finite element calculation results of the selected feature sub-elements for the finite element calculation results of other feature sub-elements in the corresponding group, and splicing the feature sub-elements in the group to obtain the finite element calculation results of each group; and splicing the finite element results of each group together to obtain the finite element results of the physical model of the micro-acoustic device. The invention can accelerate the traditional finite element method without reducing the accuracy.

Description

technical field [0001] The invention relates to the field of micro-acoustics, in particular to a building-block fast finite element simulation method and system for finite-length micro-acoustic devices. Background technique [0002] The increasingly refined design and theoretical research and development of micro-acoustic devices urgently require more accurate and general methods to simulate complex devices. Taking Surface Acoustic Wave (SAW) devices as an example, the simulation of finite-length grid arrays or non-synchronous grid regions whose periodicity is destroyed in the device, the traditional coupled mode (COM) model and other simulations with periodic boundary condition assumptions Tools are no longer up to the task. The Green's function combined with the finite element method was once internationally recognized as the most stringent accurate simulation model for finite-length SAW devices. FEM) instead of FEM / BEM has gradually become a research hotspot. However, ...

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Problems solved by technology

[0004] Based on HCT technology, the huge computing resources required for complete finite element simulation of SAW devices with finite long-period structures can be greatly reduced. , Refined design, such as SAW identification tags, the device itself does not have many periodic repeating units, so that the FEM simulation using HCT technology has to calculate multiple basic units for splicing and assembly, thereby greatly reducing the performance of the method; With the leap of the mobile network from 4G to 5G, the working frequency band above 3.5GHz will require more refined, complex and miniaturized micro-acoustic devices, so the research on the power tolerance of micro-acoustic devices has become very important, and Using HCT-FEM to calculate the surface power flow of micro-acoustic devices requires inversion to calculate the internal degrees of freedom that have been eliminated, which increases a lot of working time, making the HCT technology based on device periodicity more difficult to use

[0005] After the research and experimental demonstration of the above literature, we found that although the FEM method using HCT technology can make the accurate simulation of some SAW devices with periodicity possible, but because many micro-acoustic devices do not have periodic characteristics, there is an urgent need for a A "universal" accurate simulation method for finite-length micro-acoustic devices

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