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Atomic force microscope probe device for applying fixed force

An atomic force microscope and force technology, applied in measurement devices, scanning probe technology, scanning probe microscopy, etc., to improve sensitivity, improve test results, and avoid needle removal.

Active Publication Date: 2020-11-20
HENAN UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the prior art, there is no attention and research on the influence of the tightness of the end of the AFM probe on the test effect

Method used

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  • Atomic force microscope probe device for applying fixed force
  • Atomic force microscope probe device for applying fixed force
  • Atomic force microscope probe device for applying fixed force

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Embodiment Construction

[0023] In order to make the content of the present invention clearer and easier to understand, the content of the present invention will be further described below in conjunction with the accompanying drawings. Of course, the present invention is not limited to this specific embodiment, and general replacements known to those skilled in the art are also covered within the protection scope of the present invention.

[0024] Please refer to Figure 1 to Figure 6 , the atomic force microscope probe device provided in this embodiment includes a probe pin and a probe base. The probe includes a micro-cantilever 110 fixed on the probe base and a needle tip 120 arranged at one end of the micro-cantilever. The surface of the microcantilever 110 on which the needle tip 120 is placed is taken as the front side, and the surface opposite to the needle tip 120 is called the back side. In this embodiment, the microcantilever 110 is fixed in the probe holder by vacuum adsorption. Specifica...

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Abstract

The invention discloses an atomic force microscope probe device, which utilizes a vacuum adsorption device to counteract the gravity of a probe, and can effectively solve the problem of falling-off ofa needle in a needle changing process. A force applying member is provided with a slot patch and corresponding slots are arranged on a probe needle, the slot patch is provided with an elastic force applying device, and the slot patch is embedded into a specific position in the slot according to a test sample after a probe seat vacuum adsorbs the probe needle, so that a fixed force is applied to atail end of a probe micro-cantilever. The elastic force application device realizes an elastic fixation of the tail end of the probe micro-cantilever, effectively controls a fixation state of the probe cantilever, improves the sensitivity of the probe cantilever and improves test effect.

Description

technical field [0001] The invention relates to the technical field of semiconductor testing, in particular to a device for applying a fixed force to an atomic force microscope probe. Background technique [0002] Atomic Force Microscope (AFM) has been widely used in the testing of semiconductor samples. Its working principle is to study the extremely weak interatomic interaction force between the surface of the sample to be tested and a miniature force sensitive element (probe). The surface structure and properties of matter. Generally speaking, the probe includes a needle tip and a micro-cantilever, the end of the micro-cantilever is fixed on the probe base, and the tip of the front end of the micro-cantilever is close to the surface of the sample. When the distance between the needle tip and the sample surface is very small, there will be very weak attraction or repulsion between their atoms, which will cause the deformation of the micro-cantilever or the change of the m...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01Q60/38
CPCG01Q60/38
Inventor 赵慧玲白莹郁彩艳
Owner HENAN UNIVERSITY
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