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Acoustic resonator device with controlled placement of functionalization material

A bulk acoustic wave resonator, resonator technology, applied in measurement devices, analytical materials, material analysis using sonic/ultrasonic/infrasonic waves, etc., can solve the problem of undesired analyte adhesion, non-uniform sensitivity to changes in adsorption quality, Difficulties, etc.

Pending Publication Date: 2019-04-16
QORVO US INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Alone, excess exposed non-specific binding material may lead to undesired analyte attachment when using the device
[0010] When the analyte is present at very low concentrations in the fluid sample, the sensitivity to changes in the adsorbed mass for the position on the surface of the active region of a MEMS resonator-based biosensor is inhomogeneous and may be difficult to reliably improve High sensitivity to changes in adsorbed mass
To reiterate, it may be difficult to provide large signal changes from small changes in adsorbed mass
This difficulty can be exacerbated when the analyte-containing fluid sample is supplied parallel to the upper surface of the top-side electrode of the biosensor

Method used

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  • Acoustic resonator device with controlled placement of functionalization material
  • Acoustic resonator device with controlled placement of functionalization material
  • Acoustic resonator device with controlled placement of functionalization material

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Embodiment Construction

[0051]The embodiments set forth below represent the necessary information to enable those skilled in the art to practice the embodiments, and illustrate the best mode for practicing the embodiments. Upon reading the following description in light of the accompanying drawings, those skilled in the art will understand the concepts of the present disclosure and will recognize applications of these concepts not specifically set forth herein. It should be understood that these concepts and applications fall within the scope of the present disclosure and appended claims.

[0052] It will be understood that, although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, without departing from the scope of the pres...

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Abstract

A micro-electrical-mechanical system (MEMS) resonator device includes at least one functionalization material arranged over at least a central portion, but less than an entirety, of a top side electrode. For an active region exhibiting greatest sensitivity at a center point and reduced sensitivity along its periphery, omitting functionalization material over at least one peripheral portion of a resonator active region prevents analyte binding in regions of lowest sensitivity. The at least one functionalization material extends a maximum length in a range of from about 20% to about 95% of an active area length and extends a maximum width in a range of from about 50% to 100% of an active area width. Methods for fabricating MEMS resonator devices are also provided.

Description

[0001] Statement of Relevant Application [0002] This application claims priority to US Provisional Patent Application Serial No. 62 / 373,668, filed August 11, 2016, the disclosure of which is incorporated herein by reference in its entirety. The subject matter disclosed herein is also related to the following three US patent applications filed or to be filed on October 26, 2016: (1) US patent application entitled "Acoustic Resonator Apparatus and Method for Providing Patterned Functionalized Regions" ___ (2) U.S. Patent Applications entitled "Acoustic Resonator Devices and Methods for Functionalized Precious Metal Layers" and (3) U.S. Patent Applications entitled "Acoustic Resonator Devices and Methods for Providing Hermeticity and Surface Functionalization"_ __, the contents of the aforementioned three US patent applications are hereby incorporated by reference as if fully set forth herein. technical field [0003] The present disclosure relates to acoustic resonator device...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N29/02G01N29/036
CPCG01N29/022G01N29/036G01N2291/0255G01N2291/0256G01N2291/0426G01N33/536H03H3/02H03H9/02015H03H9/131H03H9/175H03H2003/027H03H2009/155
Inventor 马修·赖德里约·里瓦斯塞恩·爱德华兹
Owner QORVO US INC