Detection device and method for narrow-side substrate
A technology for inspecting devices and substrates, which is applied in the direction of measuring devices, measuring device casings, and parts of electrical measuring instruments, etc., can solve the problems of circuit substrate retention, circuit substrate detachment from the clamping mechanism, and inability to use the clamping mechanism, etc., to achieve The Effects of Reliable Electrical Inspections
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[0052] Below, combined with reference figure 1 An inspection device for a narrow-side substrate according to an embodiment of the present invention will be described, wherein, figure 1 It is a perspective view schematically showing a partial structure of an inspection apparatus for a narrow-side substrate according to an embodiment of the present invention.
[0053] Here, for the convenience of description, let the three directions perpendicular to each other be X direction, Y direction and Z direction, and let one side of the X direction be X1, let the other side of the X direction be X2, and let Y One side of the direction is Y1, the other side of the Y direction is Y2, one side of the Z direction is Z1, and the other side of the Z direction is Z2, and the Z direction corresponds to the vertical direction, The Z1 direction corresponds to the upper side, and the Z2 direction corresponds to the lower side.
[0054] (Structure of inspection device for narrow side substrate) ...
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