Sub-pixel edge effect correcting method and terminal device
An edge effect, sub-pixel-level technology, applied to thermometers, measuring devices, instruments, etc. that change physically/chemically, can solve the problem of low accuracy of temperature measurement results, and improve the accuracy of heat reflection temperature measurement and high temperature error and the effect of low temperature error correction
Active Publication Date: 2019-09-06
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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[0004] In view of this, the embodiment of the present invention provides a sub-pixel-level edge effect correction method and terminal equipment to solve the problem of low accuracy of the temperature measurement results of the device under test in the prior art
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[0039] In the following description, specific details such as specific system structures and technologies are presented for the purpose of illustration rather than limitation, so as to thoroughly understand the embodiments of the present invention. It will be apparent, however, to one skilled in the art that the invention may be practiced in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.
[0040] In order to illustrate the technical solutions of the present invention, specific examples are used below to illustrate.
[0041] figure 1 It is a schematic flowchart of a method for correcting sub-pixel edge effects provided by an embodiment of the present invention, and is described in detail as follows.
[0042] Step 101, acquiring multiple images of a test piece made of different mate...
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The invention is applicable to the technical field of temperature detection of microelectronic devices, and provides a sub-pixel edge effect correcting method and a terminal device. The method comprises steps: multiple images of tested pieces made of different materials are acquired; when the reading of pixel points at the same positions on a preset line section on the different images is different, a nano displacement table on a heat reflection imaging temperature measurement device is controlled to move towards a direction opposite to the pixel point moving direction by a preset distance until the reading error value of the pixel points at the same positions on the preset line section on the different images is no greater than a preset error threshold, completion of correction of sub-pixel edge effects is determined. Thus, the edge effects caused by the sub-pixel position change in X and Y directions can be corrected in an image processing mode, high-temperature errors and low-temperature errors caused by the position change of the tested piece can be corrected, and the heat reflection temperature measurement accuracy can be improved.
Description
technical field [0001] The invention belongs to the technical field of temperature detection of microelectronic devices, and in particular relates to a sub-pixel-level edge effect correction method and terminal equipment. Background technique [0002] When visible light is irradiated on the surface of a certain material, the reflectivity of the material to visible light changes with the temperature of the material. There is a linear relationship between the change in the reflectivity of the material to visible light and the temperature change on the surface of the material, as shown in the formula Wherein, the ΔR is the amount of change in reflectivity; R average is the average value of reflectivity; ΔT is the temperature change of the measured material, the unit is K; C TR is the thermal reflectance calibration coefficient, unit is K -1 . It can be seen that C TR At different times, even if the same reflectance variation ΔR is measured, the calculated ΔT must be diffe...
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IPC IPC(8): G01K11/00
CPCG01K11/00
Inventor 翟玉卫刘岩梁法国韩伟邹学锋李灏乔玉娥丁晨
Owner THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP