A kind of photoinduced ultrasonic transducer and its preparation method

A photo-induced ultrasonic and transducer technology, applied in ultrasonic/sonic/infrasonic diagnosis, sonic diagnosis, infrasonic diagnosis, etc., can solve the problems of uneven coating, uncontrollable thickness of transducer, low frequency, etc. High thermal conductivity, improve photoacoustic conversion efficiency, and improve the effect of axial thermal conductivity

Inactive Publication Date: 2020-09-08
HUAZHONG UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0003] In view of the defects of the prior art, the purpose of the present invention is to solve the technical problems of uncontrollable thickness of the transducer, low frequency, miniaturization of structure and uneven coating film after miniaturization during the preparation process of photoinduced ultrasonic transducers

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  • A kind of photoinduced ultrasonic transducer and its preparation method
  • A kind of photoinduced ultrasonic transducer and its preparation method
  • A kind of photoinduced ultrasonic transducer and its preparation method

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Embodiment Construction

[0031] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.

[0032] figure 1 It is a flow chart of the preparation method of the photo-ultrasonic transducer provided by the invention; as figure 1 shown, including the following steps:

[0033] S101, growing a carbon nanotube array film on a silicon wafer by chemical vapor deposition;

[0034] S102, configure polydimethylsiloxane mixed liquid, the mixed liquid includes polydimethylsiloxane and curing age...

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Abstract

The invention discloses a photoinduced ultrasonic transducer and a manufacturing method thereof. The method comprises the following steps that 1, a silicon wafer of a cuboid shape is selected and cleaned ultrasonically; 2, a chemistry gas phase precipitation method is adopted for growing a carbon nanometer tube array film on the silicon wafer; 3, a PDMS mixed solution is prepared; 4, the preparedPDMS is dropped on the carbon nanometer tube array film to be dispersed on the top of a carbon nanometer tube array; 5, the carbon nanometer tube array film on which the PDMS is dropped is placed intoa vacuum environment; 6, after vacuumizing is completed, the carbon nanometer tube array film is cured; 7, after the carbon nanometer tube array film is cured, the carbon nanometer tube array film istorn off from the silicon wafer, an induction coupling plasma etching method (ICP) is adopted for etching the carbon nanometer tube array film to enable the film to become thinner, and reach the expected thickness; and 8, after pulse laser acts on the thinned carbon nanometer tube array film, high-frequency ultrasonic signal is generated. The method is simple in technology and convenient to operate, and the performance of the manufactured high-frequency opto-acoustic transducer is good.

Description

technical field [0001] The invention relates to the field of ultrasonic technology, and more specifically, to a photoinduced ultrasonic transducer and a preparation method thereof. Background technique [0002] With the advantages of safety, convenience, low price, and good real-time performance, medical ultrasound has always played an important role in the diagnosis and treatment of clinical diseases. As a key component of ultrasonic generation and reception, ultrasonic transducers have always been a research hotspot at home and abroad. Traditional ultrasonic transducers are electrically driven devices, relying on the piezoelectric and inverse piezoelectric properties of materials to realize the energy and information interaction between "electricity" and "sound". With the gradual deepening of people's understanding and research on the photo-induced ultrasonic effect, the concept of photo-induced ultrasonic thin film was proposed. Photoinduced ultrasonic thin film is an o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B06B1/00A61B8/12A61B8/00
CPCA61B8/12A61B8/4483B06B1/00
Inventor 朱本鹏雷爽杨晓非李家普
Owner HUAZHONG UNIV OF SCI & TECH
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