Photoinduced ultrasonic transducer and manufacturing method thereof

Abstract

The invention discloses a photoinduced ultrasonic transducer and a manufacturing method thereof. The method comprises the following steps that 1, a silicon wafer of a cuboid shape is selected and cleaned ultrasonically; 2, a chemistry gas phase precipitation method is adopted for growing a carbon nanometer tube array film on the silicon wafer; 3, a PDMS mixed solution is prepared; 4, the preparedPDMS is dropped on the carbon nanometer tube array film to be dispersed on the top of a carbon nanometer tube array; 5, the carbon nanometer tube array film on which the PDMS is dropped is placed intoa vacuum environment; 6, after vacuumizing is completed, the carbon nanometer tube array film is cured; 7, after the carbon nanometer tube array film is cured, the carbon nanometer tube array film istorn off from the silicon wafer, an induction coupling plasma etching method (ICP) is adopted for etching the carbon nanometer tube array film to enable the film to become thinner, and reach the expected thickness; and 8, after pulse laser acts on the thinned carbon nanometer tube array film, high-frequency ultrasonic signal is generated. The method is simple in technology and convenient to operate, and the performance of the manufactured high-frequency opto-acoustic transducer is good.

Description

technical field [0001] The invention relates to the field of ultrasonic technology, and more specifically, to a photoinduced ultrasonic transducer and a preparation method thereof. Background technique [0002] With the advantages of safety, convenience, low price, and good real-time performance, medical ultrasound has always played an important role in the diagnosis and treatment of clinical diseases. As a key component of ultrasonic generation and reception, ultrasonic transducers have always been a research hotspot at home and abroad. Traditional ultrasonic transducers are electrically driven devices, relying on the piezoelectric and inverse piezoelectric properties of materials to realize the energy and information interaction between "electricity" and "sound". With the gradual deepening of people's understanding and research on the photo-induced ultrasonic effect, the concept of photo-induced ultrasonic thin film was proposed. Photoinduced ultrasonic thin film is an o...

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Problems solved by technology

[0003] In view of the defects of the prior art, the purpose of the present invention is to solve the technical problems of uncontrollable thickness of the transducer, low frequency, miniaturization of structure and uneven coating film after miniaturization during the preparation process of photoinduced ultrasonic transducers

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