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Phase detection autofocus pixel element and method of forming same, image sensor and method of forming same

A phase detection and automatic technology, applied in image communication, electrical components, electric solid-state devices, etc., can solve the problems of small response angle and low focus sensitivity, to increase the response angle, increase the amount of incoming light, and increase the difference in light intensity Effect

Active Publication Date: 2022-04-01
淮安西德工业设计有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, the PDAF pixel in the existing image sensor has a small response angle to light, the detected light intensity difference is small, and the focus sensitivity is not high, so it is necessary to develop a new image sensor capable of autofocus

Method used

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  • Phase detection autofocus pixel element and method of forming same, image sensor and method of forming same

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Embodiment Construction

[0037] The following description provides specific application scenarios and requirements of the application, with the purpose of enabling those skilled in the art to manufacture and use the contents of the application. Various local modifications to the disclosed embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other embodiments and embodiments without departing from the spirit and scope of the disclosure. application. Thus, the present disclosure is not limited to the embodiments shown, but is to be accorded the widest scope consistent with the claims.

[0038] The technical solution of the present invention will be described in detail below in conjunction with the embodiments and the accompanying drawings.

[0039] This embodiment provides a method for forming a phase detection autofocus (hereinafter referred to as PDAF) pixel element, referring to Figure 2 to Figure 5 , comprising: providing a ...

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Abstract

The present application relates to the field of semiconductor technology, in particular to a phase detection autofocus pixel element and its forming method, and an image sensor and its forming method. The phase detection autofocus pixel element (PDAF) includes: a semiconductor substrate, the semiconductor substrate includes at least two pixel regions; an anti-reflection layer, the anti-reflection layer is located on the semiconductor substrate; at least two buried A lens, the at least two buried lenses are located on the anti-reflection layer, and the positions correspond to the at least two pixel areas. The buried lens can gather the light incident into the PDAF pixel element, increase the amount of light entering the PDAF pixel element, increase the light intensity difference between the pixel regions in the PDAF element, and increase the pair of PDAF pixel elements. The response angle of the light improves the focus sensitivity.

Description

technical field [0001] The present application relates to the field of semiconductor technology, and in particular to a phase detection autofocus pixel element and its forming method, and an image sensor including the phase detection autofocus pixel element and its forming method. Background technique [0002] An image sensor is a device that converts an optical image into an electrical signal. With the development of the computer and communication industries, the demand for high-performance image sensors is increasing. These high-performance image sensors are widely used in digital cameras, video recorders, personal communication systems (PCS), game consoles, security cameras, and medical miniature cameras. various fields. [0003] The image sensor array may include pixel units for imaging and pixel units for autofocusing of the lens. One method of achieving autofocus is called Phase Detective Autofocus (PDAF). figure 1 It is a structural schematic diagram of a PDAF pixe...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/146H04N5/369
CPCH01L27/14627H01L27/14621H01L27/14685H04N25/70
Inventor 黄增智倪凌云黄晓橹
Owner 淮安西德工业设计有限公司