Multi-channel infrared spectrum detector based on integrated circuit technology and its preparation method

Abstract

The invention discloses a multi-channel infrared spectrum detector based on integrated circuit technology and a preparation method thereof. The detector includes a plurality of detection array units composed of metal surface plasmon structures and microbolometers; the metal surface plasmon structure adopts a square metal cylinder arranged periodically, and the surrounding of the metal cylinder is air; The microbolometer includes pier, bridge arm, infrared absorber and thermistor; the metal surface plasmon structure is deposited on the infrared absorber of the microbolometer; the metal surface plasmon excitation of multiple detection array units The parameters of the metastructure are not the same. The present invention integrates metal surface plasmon structure and infrared detector modules on the same infrared detector array chip through integrated circuit technology, can obtain detection signal light information of different wavelengths, and can realize simultaneous detection of multiple wavelength signals , and has the advantages of simple structure, easy integration, and low cost.

Description

technical field [0001] The invention relates to the field of infrared signal detection, and further relates to an infrared spectrum detector integrated with a light splitting element based on an integrated circuit technology and a preparation method thereof. Background technique [0002] According to its relationship with visible light, infrared spectrum can be divided into near infrared (wavelength range 0.75 μm ~ 2.5 μm), mid infrared (wavelength range 2.5 μm ~ 25 μm) and far infrared (wavelength range 25 μm ~ 300 μm). In organic molecules, the vibration frequency of atoms forming chemical bonds or functional groups is equivalent to the frequency of infrared light. The infrared spectrum obtained by irradiating organic molecules with infrared light can be used to detect the information of various chemical bonds and functional groups of organic molecules; infrared absorption bands The absorption intensity is related to the content of chemical groups, and can be used for quan...

AI Technical Summary

Problems solved by technology

The spectrometer has the advantages of large luminous flux, wide spectral range, high resolution and fast scanning speed, etc., but its core component is an interferometer that requires extremely high processing accuracy, and has strict requirements on the working environment. detection error, poor stability, high manufacturing cost, and large volume, it is difficult to promote in the industry

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