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A method for repairing heavy rare earth metal targets

A repair method and metal target technology, applied in metal material coating process, vacuum evaporation plating, coating and other directions, can solve problems such as unreusable

Active Publication Date: 2021-08-10
BAOTOU JINSHAN MAGNETIC MATERIAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The target material repaired by the repair method provided by the present invention effectively solves the problem that the existing target material cannot be reused after defects are generated on the surface; and the process is simple and the cycle is short, and the repaired target material is used to coat the sintered NdFeB magnet and Diffusion, compared with the original target, the coercive force of sintered NdFeB magnets can be increased by 95-98%, and the use effect is close to that of the new target, but the cost of the target is only 30-40 of the direct use of the new target. %, the cost advantage is very obvious and has good application value

Method used

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  • A method for repairing heavy rare earth metal targets
  • A method for repairing heavy rare earth metal targets
  • A method for repairing heavy rare earth metal targets

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] 1) Pretreat the target to be repaired: that is, use 4wt% sodium hydroxide solution to remove oil, rinse with deionized water, and dehydrate with absolute ethanol;

[0037] Among them, the target to be repaired is a dysprosium-terbium alloy target (the mass ratio of dysprosium to terbium is 1:1, and the sum of dysprosium and terbium content is >99wt%); the surface of the target to be repaired has a "racetrack" type loss area; the target to be repaired The size of the material is 350*125*10mm;

[0038] 2) Dysprosium, terbium, aluminum and gallium with a mass ratio of 4:4:1:1 were melted into alloy ingots in a medium-frequency induction melting furnace, and placed in a hydrogen crushing furnace for hydrogenation at 650°C to obtain alloy powder ;

[0039] 3) Put the pretreated target to be repaired in a rubber mold with a size of 352*127*11mm, add alloy powder to make the alloy powder cover the surface of the heavy rare earth metal target to be repaired, and use vacuum sin...

Embodiment 2

[0043] 1) Pretreat the target to be repaired: that is, use 4wt% sodium hydroxide solution to remove oil, rinse with deionized water, and dehydrate with absolute ethanol;

[0044] Among them, the target to be repaired is a dysprosium-terbium alloy target (the mass ratio of dysprosium to terbium is 1:1, and the sum of dysprosium and terbium content is >99wt%); the surface of the target to be repaired has a "racetrack" type loss area; the target to be repaired The specification of the material is 350*125*10mm;

[0045] 2) Dysprosium, terbium, aluminum and gallium with a mass ratio of 4:4:1:1 were melted into alloy ingots in a medium-frequency induction melting furnace, and placed in a hydrogen crushing furnace for hydrogenation at 650°C to obtain alloy powder ;

[0046] 3) The pretreated target to be repaired is inert to the heavy rare earth metal target with an upper protective cover located on the heavy rare earth metal target and a bottom protective cover located at the botto...

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Abstract

The invention provides a heavy rare earth metal target repair method, which belongs to the technical field of magnetron sputtering surface treatment. The method for repairing heavy rare earth metal targets provided by the present invention includes the following steps: filling alloy powder into the loss area of ​​the target to be repaired, and repairing by vacuum sintering method or high-pressure cold spraying method; the alloy powder includes dysprosium-terbium alloy, Alternatively, one or both of dysprosium and terbium and one or both of amphoteric metals. In the present invention, alloy powder is used as the repair material, and the vacuum sintering method or high-pressure cold spraying method is used for repairing. The alloy powder plays a brazing role, reduces the sintering temperature during subsequent target repair, and reduces the diffusion temperature of the magnetic sheet after coating. , reducing the difficulty and cost of repair. The repaired target material structure of the present invention effectively solves the problem that the surface of the existing target material cannot be reused due to defects; and the process is simple, the cycle is short, and the use effect is close to that of a new target material, so it has good application value.

Description

technical field [0001] The invention relates to the technical field of magnetron sputtering surface treatment, in particular to a method for repairing a heavy rare earth metal target. Background technique [0002] Magnetron sputtering has the characteristics of simple operation, easy precise control of process parameters and good film quality. It has become one of the most important coating methods in modern times. It is applied to the surface coating of various materials such as metals, semiconductors and insulators. The advantages of film thickness, large coating area and strong adhesion. Magnetron sputtering introduces a magnetic field on the surface of the target cathode, and uses the magnetic field to confine the charged particles to increase the plasma density to increase the sputtering rate. It is currently widely used in integrated circuits, information storage, liquid crystal displays, laser memories, and electronic controllers. The main electronic information and ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34C23C24/04B22F3/10C22C28/00
CPCB22F3/1007B22F2999/00C22C28/00C23C14/3414C23C24/04B22F2201/20
Inventor 王瑜李艳丽夏峰刘吉祥周文洁张雪飞王雷
Owner BAOTOU JINSHAN MAGNETIC MATERIAL
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