Unlock instant, AI-driven research and patent intelligence for your innovation.
A method for repairing heavy rare earth metal targets
What is Al technical title?
Al technical title is built by PatSnap Al team. It summarizes the technical point description of the patent document.
A repair method and metal target technology, applied in metal material coating process, vacuum evaporation plating, coating and other directions, can solve problems such as unreusable
Active Publication Date: 2021-08-10
BAOTOU JINSHAN MAGNETIC MATERIAL
View PDF5 Cites 0 Cited by
Summary
Abstract
Description
Claims
Application Information
AI Technical Summary
This helps you quickly interpret patents by identifying the three key elements:
Problems solved by technology
Method used
Benefits of technology
Problems solved by technology
The target material repaired by the repair method provided by the present invention effectively solves the problem that the existing target material cannot be reused after defects are generated on the surface; and the process is simple and the cycle is short, and the repaired target material is used to coat the sintered NdFeB magnet and Diffusion, compared with the original target, the coercive force of sintered NdFeB magnets can be increased by 95-98%, and the use effect is close to that of the new target, but the cost of the target is only 30-40 of the direct use of the new target. %, the cost advantage is very obvious and has good application value
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more
Image
Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
Click on the blue label to locate the original text in one second.
Reading with bidirectional positioning of images and text.
Smart Image
Examples
Experimental program
Comparison scheme
Effect test
Embodiment 1
[0036] 1) Pretreat the target to be repaired: that is, use 4wt% sodium hydroxide solution to remove oil, rinse with deionized water, and dehydrate with absolute ethanol;
[0037] Among them, the target to be repaired is a dysprosium-terbium alloy target (the mass ratio of dysprosium to terbium is 1:1, and the sum of dysprosium and terbium content is >99wt%); the surface of the target to be repaired has a "racetrack" type loss area; the target to be repaired The size of the material is 350*125*10mm;
[0038] 2) Dysprosium, terbium, aluminum and gallium with a mass ratio of 4:4:1:1 were melted into alloy ingots in a medium-frequency induction melting furnace, and placed in a hydrogen crushing furnace for hydrogenation at 650°C to obtain alloy powder ;
[0039] 3) Put the pretreated target to be repaired in a rubber mold with a size of 352*127*11mm, add alloy powder to make the alloy powder cover the surface of the heavy rare earth metal target to be repaired, and use vacuum sin...
Embodiment 2
[0043] 1) Pretreat the target to be repaired: that is, use 4wt% sodium hydroxide solution to remove oil, rinse with deionized water, and dehydrate with absolute ethanol;
[0044] Among them, the target to be repaired is a dysprosium-terbium alloy target (the mass ratio of dysprosium to terbium is 1:1, and the sum of dysprosium and terbium content is >99wt%); the surface of the target to be repaired has a "racetrack" type loss area; the target to be repaired The specification of the material is 350*125*10mm;
[0045] 2) Dysprosium, terbium, aluminum and gallium with a mass ratio of 4:4:1:1 were melted into alloy ingots in a medium-frequency induction melting furnace, and placed in a hydrogen crushing furnace for hydrogenation at 650°C to obtain alloy powder ;
[0046] 3) The pretreated target to be repaired is inert to the heavy rare earth metal target with an upper protective cover located on the heavy rare earth metal target and a bottom protective cover located at the botto...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More
PUM
Property
Measurement
Unit
particle size
aaaaa
aaaaa
size
aaaaa
aaaaa
size
aaaaa
aaaaa
Login to View More
Abstract
The invention provides a heavy rare earth metal target repair method, which belongs to the technical field of magnetron sputtering surface treatment. The method for repairing heavy rare earth metal targets provided by the present invention includes the following steps: filling alloy powder into the loss area of the target to be repaired, and repairing by vacuum sintering method or high-pressure cold spraying method; the alloy powder includes dysprosium-terbium alloy, Alternatively, one or both of dysprosium and terbium and one or both of amphoteric metals. In the present invention, alloy powder is used as the repair material, and the vacuum sintering method or high-pressure cold spraying method is used for repairing. The alloy powder plays a brazing role, reduces the sintering temperature during subsequent target repair, and reduces the diffusion temperature of the magnetic sheet after coating. , reducing the difficulty and cost of repair. The repaired target material structure of the present invention effectively solves the problem that the surface of the existing target material cannot be reused due to defects; and the process is simple, the cycle is short, and the use effect is close to that of a new target material, so it has good application value.
Description
technical field [0001] The invention relates to the technical field of magnetron sputtering surface treatment, in particular to a method for repairing a heavy rare earth metal target. Background technique [0002] Magnetron sputtering has the characteristics of simple operation, easy precise control of process parameters and good film quality. It has become one of the most important coating methods in modern times. It is applied to the surface coating of various materials such as metals, semiconductors and insulators. The advantages of film thickness, large coating area and strong adhesion. Magnetron sputtering introduces a magnetic field on the surface of the target cathode, and uses the magnetic field to confine the charged particles to increase the plasma density to increase the sputtering rate. It is currently widely used in integrated circuits, information storage, liquid crystal displays, laser memories, and electronic controllers. The main electronic information and ...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More
Application Information
Patent Timeline
Application Date:The date an application was filed.
Publication Date:The date a patent or application was officially published.
First Publication Date:The earliest publication date of a patent with the same application number.
Issue Date:Publication date of the patent grant document.
PCT Entry Date:The Entry date of PCT National Phase.
Estimated Expiry Date:The statutory expiry date of a patent right according to the Patent Law, and it is the longest term of protection that the patent right can achieve without the termination of the patent right due to other reasons(Term extension factor has been taken into account ).
Invalid Date:Actual expiry date is based on effective date or publication date of legal transaction data of invalid patent.
Login to View More