96results about How to "Reduce the amount of introduction" patented technology

The present invention is characterized in that gettering is performed such that impurity regions to which a noble gas element is added are formed in a semiconductor film and the metallic element included in the semiconductor film is segregated into the impurity regions by laser annealing. Also, a reflector is provided under a substrate on which a semiconductor film is formed. When laser light transmitted through the semiconductor film substrate is irradiated from the front side of the substrate, the laser beam is reflected by the reflector and thus the laser light can be irradiated to the semiconductor film from the read side thereof. Laser light can be also irradiated to low concentration impurity regions overlapped with a portion the gate electrode. Thus, an effective energy density in the semiconductor film is increased to thereby effect recovery of crystallinity and activation of the impurity element.

The invention relates to a sewage treatment method which comprises the following steps of: carrying out grille treatment on sewage, entering a biological flocculation reaction device, entering an anaerobic and aerobic device after primary sedimentation, entering a secondary sedimentation tank after biochemical reaction and conveying all residual sludge discharged by the secondary sedimentation tank to the biological flocculation reaction device to be acclimatized into a microbial flocculant for use; and conveying sludge discharged from a primary sedimentation tank to a sludge concentration tank and conveying to a sludge dewatering room after concentration for treatment. The sewage treatment method has the beneficial effects that the goal of treatment of wastes with processes of wastes against one another is achieved, and the residual sewage is taken the microbial flocculant, so that the introduction quantity of chemical flocculant pollutants is reduced, the expenditure of the flocculant is saved, and the running cost of sewage treatment can be reduced by about 1 / 3; after wastewater is subjected to biological flocculation reaction, the treatment load concentration of a subsequent sewage treatment facility is reduced by about 40-60 percent, and a dosing room, a flocculant dissolving tank and other equipotent and facilities are not required to be constructed, so that the capital construction investment can be saved; and the concentrations of poisonous and harmful pollutants in the sewage subjected to the biological flocculation reaction are greatly reduced, so that the activities of microorganisms in all subsequent treatment units are improved.

There is provided a processing method for performing a recovery process on a damaged layer formed on a surface of a low-k film of a target substrate by introducing a processing gas containing a methyl group into a processing chamber. The method includes: increasing an internal pressure of the processing chamber up to a first pressure lower than a processing pressure for the recovery process by introducing a dilution gas into the processing chamber maintained in a depressurized state; then stopping the introduction of the dilution gas, and increasing the internal pressure of the processing chamber up to a second pressure as the processing pressure for the recovery process by introducing the processing gas into a region where the target substrate exists within the processing chamber; and performing the recovery process on the target substrate while the processing pressure is maintained.