High-precision Z-direction single-freedom-degree micro-positioning platform based on triangular grid hinge

A technology of micro-positioning platform and triangular grid, which is applied to the parts of the instrument, instruments, etc., can solve the problems that restrict the promotion of micro-nano technology, and achieve the effect of high longitudinal stiffness, compact structure and good symmetry

Inactive Publication Date: 2019-11-05
TIANJIN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the high-precision micro-positioning platform has always restricted the promotion of micro-nano technology
At present, the low-stiffness Z-direction single-degree-of-freedom micro-positioning platform has made a major breakthrough, but the high-rigidity high-precision Z-direction single-degree-of-freedom micro-positioning platform still needs to be further improved.

Method used

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  • High-precision Z-direction single-freedom-degree micro-positioning platform based on triangular grid hinge
  • High-precision Z-direction single-freedom-degree micro-positioning platform based on triangular grid hinge
  • High-precision Z-direction single-freedom-degree micro-positioning platform based on triangular grid hinge

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Embodiment Construction

[0030] In order to further understand the invention content, characteristics and effects of the present invention, the following examples are given, and detailed descriptions are as follows in conjunction with the accompanying drawings:

[0031] as attached Figure 1 to Figure 7b As shown, a high-precision Z-direction single-degree-of-freedom micro-positioning platform based on a triangular mesh hinge includes a triangular mesh hinge support ring 1 , a base 2 , a spacer 3 and a piezoelectric ceramic driver 4 .

[0032] The triangular mesh hinge support ring 1 includes an outer ring 11 with a thicker periphery, a thicker terminal platform 12 in the middle, and a thinner triangular mesh hinge 13 between the outer ring 11 and the terminal platform 12 . The center of the bottom of the terminal platform 12 is in contact with the top of the piezoelectric ceramic driver 4 . The outer ring 11 is provided with six through holes uniformly distributed in the circumferential direction. ...

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Abstract

The invention discloses a high-precision Z-direction single-freedom-degree micro-positioning platform based on a triangular grid hinge. The platform comprises a triangular grid hinge supporting ring,a base and a piezoelectric ceramic driver; the triangular grid hinge supporting ring comprises an outer ring on the periphery, a terminal platform located on the center and the triangular grid hinge located between the outer ring and the terminal platform, the triangular grid hinge is of a triangular grid structure formed by regular triangles, the outer ring is fixedly connected to the base, the piezoelectric ceramic driver is fixedly connected into the base, the bottom center of the terminal platform is in contact with the top end of the piezoelectric ceramic driver, and the piezoelectric ceramic driver generates Z-direction displacement to drive the terminal platform to generate Z-direction displacement. The triangular grid hinge which is designed based on the geometry principle and formed through the regular triangles is adopted, the advantages of being extremely high in rigidity, good in symmetry, and compact in structure are achieved, and high-precision high-bandwidth motion and positioning of the terminal platform in the Z direction can be achieved.

Description

technical field [0001] The invention relates to a micro-positioning platform, in particular to a high-precision Z-direction single-degree-of-freedom micro-positioning platform based on triangular mesh hinges. Background technique [0002] With the development of science and technology, micro-nano technology has been widely used. However, the high-precision micro-positioning platform has always restricted the promotion of micro-nano technology. At present, the low-stiffness Z-direction single-degree-of-freedom micro-positioning platform has achieved a major breakthrough, but the high-rigidity high-precision Z-direction single-degree-of-freedom micro-positioning platform still needs to be further improved. Contents of the invention [0003] The purpose of the present invention is to overcome the deficiencies in the prior art and provide a high-precision Z-direction single-degree-of-freedom micro-positioning platform based on triangular mesh hinges, which can realize the Z-d...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G12B5/00
CPCG12B5/00
Inventor 田延岭杨明旋王福军周重凯李兵臣赵殿纯马越
Owner TIANJIN UNIV
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