Unlock instant, AI-driven research and patent intelligence for your innovation.

Curved exposure apparatus and method

A technology of exposure device and exposure method, which is applied in the direction of photolithography process exposure device, microlithography exposure equipment, optics, etc., to save time and cost, improve product qualification rate, and control exposure area.

Pending Publication Date: 2019-11-08
ADVANCED MICRO LITHO INSTR INC
View PDF0 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the above technical problems, the object of the present invention is to provide a curved surface exposure device and a curved surface exposure method to solve the problem of making fixtures according to the pattern of the area to be exposed

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Curved exposure apparatus and method
  • Curved exposure apparatus and method
  • Curved exposure apparatus and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0023] The present invention will be described in detail below in conjunction with specific embodiments shown in the accompanying drawings.

[0024] In each drawing of the present invention, for convenience of illustration, some dimensions of structures or parts are exaggerated relative to other structures or parts, and therefore, are only used to illustrate the basic structure of the subject matter of the present invention.

[0025] It should be understood that although the terms first, second, etc. may be used herein to describe various elements or structures, these described objects should not be limited by these terms. These terms are only used to distinguish these described objects from one another.

[0026] see figure 1 , the curved surface exposure device 100 provided by an embodiment of the present invention includes a base 1, a bracket 2 erected on the base 1, a control mechanism, and an object-carrying mechanism 3 arranged on the base 1. The object-carrying mechanis...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The present invention provides a curved exposure apparatus and method. The curved exposure apparatus comprises a bracket, a control mechanism, a carrier mechanism and an optical projection mechanism arranged on the bracket. The carrier mechanism comprises a carrier table and a driving piece, the optical projection mechanism emits light to the carrier table in a first direction, and the driving piece drives the carrier table to overturn in a direction perpendicular to the first axis of the first direction; and the control mechanism is connected with and controls the driving piece, and comprisesan obtaining unit used for obtaining the surface shape information of an area to be exposed, and a path control unit, and the path control unit is used for controlling the driving piece to drive thecarrier table to overturn around the first axis according to the surface shape information to allow at least part of the carrier table to be located on the emitting path of the light at most. Therefore, a jig is not manufactured to save a lot of time and cost, the exposure area is accurately controlled, and the product qualification rate is improved.

Description

technical field [0001] The invention relates to the field of exposure equipment, in particular to a curved surface exposure device and a curved surface exposure method. Background technique [0002] When the existing exposure equipment exposes the curved surface product, the surface object is covered by the jig to cover the area that does not need to be exposed. The area blocked by the fixture is exposed to light, thereby realizing the exposure of curved surface objects. However, the existing exposure equipment needs to make jigs according to the pattern of the area to be exposed. Therefore, each product needs to make a new jig, which takes a lot of time and cost, and is prone to poor fixation between the jig and the curved surface. In this case, the jig is displaced during the exposure process, resulting in deviations in the exposure area, and the yield rate is low. Contents of the invention [0003] In order to solve the above technical problems, the object of the pres...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20G03F7/24
CPCG03F7/70725G03F7/70483G03F7/24
Inventor 蔡志国江俊龙
Owner ADVANCED MICRO LITHO INSTR INC