A leak detection device and leak detection method for large leak measurement

A technology of leak detection and gas storage chamber, which is applied in the direction of measuring the rate of increase and deceleration of fluid, and liquid tightness measurement using liquid/vacuum degree, etc. It can solve the problems of huge deviation of test results, exhaustion, helium overflow, etc. , to achieve the effects of simple structure, fast leak detection speed and accurate leak detection results

Inactive Publication Date: 2022-01-14
ULVAC ORIENT CHENGDU
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This leak detection method can perform high-precision vacuum box helium leak detection on non-pre-filled helium self-closing body workpieces, but if the leak hole on the workpiece is large, after the helium pressure is completed on the workpiece, the helium pressure cavity will be exhausted, Purge the floating helium on the surface of the workpiece, vacuumize the detection chamber after being placed in the detection chamber, and the pressed helium will overflow in large quantities during the entire process flow of the workpiece, or even completely dissipate.
This leads to huge deviations in test results, and even major quality problems where missing products are judged as qualified products.

Method used

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  • A leak detection device and leak detection method for large leak measurement

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Embodiment

[0022] Such as figure 1 As shown, this embodiment provides a leak detection device for large leak measurement, including a gas source 1, a gas storage chamber 2 connected to the gas source 1 through a gas source pipeline, and a vacuum chamber connected to the gas storage chamber 2 through an inflation pipeline. Chamber 3, a pressure sensor 4 connected to the gas storage chamber 2, an inflation valve 5 is provided at the interface connected between the vacuum chamber 3 and the inflation pipeline, and an air source valve 6 is provided at the interface connected between the gas storage chamber 2 and the gas source pipeline;

[0023] Among them, several vacuum chambers 3 are respectively connected to the gas storage chamber 2 through a plurality of inflatable pipes, and several gas storage chambers 2 are respectively connected to the gas source 1 through gas source pipes.

[0024] The leak detection method provided by the leak detection device in this embodiment is characterized i...

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Abstract

The invention provides a leak detection device for large leak measurement, which includes a gas source, a gas storage chamber connected to the gas source through a gas source pipeline, a vacuum chamber connected to the gas storage chamber through an inflatable pipeline, and a gas storage chamber connected to the gas storage chamber. A pressure sensor, an inflation valve is arranged at the interface connecting the vacuum chamber and the inflation pipeline, and an air source valve is arranged at the interface connecting the air storage chamber and the gas source pipeline.

Description

technical field [0001] The invention belongs to the technical field of large leak measurement, and in particular relates to a leak detection device and a leak detection method for large leak measurement. Background technique [0002] For the method of helium leak detection for self-closing workpieces, helium leak detection in a helium pressure vacuum box is usually used, that is, the workpiece is placed in a helium pressure chamber, and helium gas with a set pressure is filled into the helium pressure chamber for the set time. If it is a leaky workpiece, the helium in the helium pressure chamber will enter the inside of the workpiece through the leak hole (leaky part) of the leaky workpiece. A workpiece without leaks will not leak helium into the workpiece. After the set helium pressure time is completed, the helium in the helium pressure chamber is exhausted, and then the workpiece is taken out, and the surface of the workpiece is purged with nitrogen to remove the floatin...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M3/26
CPCG01M3/26
Inventor 张果蓝峰李健瞿骑龙雷福元钟林王华仙
Owner ULVAC ORIENT CHENGDU
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