An acoustic wave device and filtering apparatus are provided

An acoustic wave device and composite layer technology, which is applied to electrical components, impedance networks, etc., can solve the problems of Q value reduction, energy leakage in the lateral and vertical directions, and frequency shift of surface acoustic wave devices, so as to achieve Q value enhancement and longitudinal energy. Leakage suppression, the effect of reducing frequency offset

Pending Publication Date: 2019-12-13
EPIC MEMS XIAMEN CO LTD
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Problems solved by technology

[0003] In recent years, piezoelectric materials on insulating substrates have been gradually applied in surface acoustic wave devices because of their high Q value and go

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  • An acoustic wave device and filtering apparatus are provided
  • An acoustic wave device and filtering apparatus are provided
  • An acoustic wave device and filtering apparatus are provided

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[0033] In order to enable those skilled in the art to better understand the solution of the present application, the present application will be further described in detail below in conjunction with the drawings and specific implementation methods. Apparently, the described embodiments are only some of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

[0034] In the following description, a lot of specific details are set forth in order to fully understand the present invention, but the present invention can also be implemented in other ways different from those described here, and those skilled in the art can do it without departing from the meaning of the present invention. By analogy, the present invention is therefore not limited to the specific examples disclosed bel...

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Abstract

The acoustic wave device comprises a substrate, a composite layer and an electrode layer which are sequentially stacked from bottom to top, the composite layer is provided with a closed groove in a preset shape, the composite layer comprises a temperature compensation layer and a piezoelectric layer which are stacked from bottom to top, and the electrode layer is located on the upper surface of the composite layer in the groove. Visibly, the composite layer is provided with a groove; the electrode layer is positioned on the upper surface of the composite layer in the groove; when sound waves are propagated along the transverse direction, the sound wave is reflected back by the edge of the piezoelectric layer positioned on the outer side of the groove; the energy of the sound wave is limited below the electrode layer, and transverse energy leakage is reduced; when sound waves are propagated in the longitudinal direction, due to the fact that the propagation speed of the sound waves of the substrate is higher than that of the composite layer, the sound waves are almost propagated only in the composite layer and cannot leak into the substrate, longitudinal energy leakage is restrained, the Q value is increased, and frequency deviation caused by temperature changes can be reduced due to the existence of the temperature compensation layer. The invention further provides a filteringdevice with the advantages.

Description

technical field [0001] The present application relates to the technical field of filtering devices, in particular to an acoustic wave device and a filtering device. Background technique [0002] A Surface Acoustic Wave (SAW) device is a device that uses interdigitated electrodes to convert electrical energy into acoustic energy, or vice versa, and is widely used in filters, delay lines, oscillators, etc. [0003] In recent years, piezoelectric materials on insulating substrates have been gradually applied in surface acoustic wave devices because of their high Q value and good temperature compensation effect. There is a problem of leakage, which in turn reduces the Q value of the surface acoustic wave device, and is prone to frequency shifts caused by temperature changes. [0004] Therefore, how to reduce the energy leakage of the surface acoustic wave device, improve the Q value, and reduce the frequency offset of the device should be focused on by those skilled in the art....

Claims

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Application Information

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IPC IPC(8): H03H9/02H03H9/64
CPCH03H9/02669H03H9/02834H03H9/02842H03H9/64
Inventor 彭波华胡念楚贾斌
Owner EPIC MEMS XIAMEN CO LTD
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