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Inspection system and method of inspection for substrate containers

A technology for inspection systems and containers, applied in the field of inspection systems, can solve the problems that substrate containers are easily contaminated and wafer manufacturing and processing are not so effective

Pending Publication Date: 2020-03-24
布鲁克斯自动化(德国)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Substrate containers like FOUPs are also prone to contamination, making e.g. wafer fabrication processing less efficient

Method used

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  • Inspection system and method of inspection for substrate containers
  • Inspection system and method of inspection for substrate containers
  • Inspection system and method of inspection for substrate containers

Examples

Experimental program
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Embodiment Construction

[0034] refer tofigure 1 , generally designated 10, is adapted to inspect a container body 20 of a container for holding a substrate. exist figure 1 In , as a typical example of such a container, a body 20 of a FOUP is partially shown. The container body 20 includes a front surface 20 a defining an opening of the body, through which a wafer can be inserted into the interior 21 of the container body 20 . The opening can be closed by a cover member 21, in figure 1 The cover member 21 is not shown in the Figure 5 and Figure 6 A cover member 21 is schematically shown in , which interacts with the front surface 20a so as to be able to provide a controlled atmosphere in the interior 21 of the container body 20 .

[0035] In order to provide such a controlled atmosphere in the interior 21 after closing the opening with the lid member 21 , a valve member 22 is provided in the lower inner surface 20 b of the container body 20 . Such as figure 1 As shown, these valves are dispose...

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PUM

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Abstract

The present invention relates to an inspection system configured and adapted for inspecting a substrate container or a component of a substrate container, the container or the component comprising a plurality of surfaces, the system comprising at least one mirror (110) arranged and configured to provide a simultaneous view of at least a first one and a second one of the plurality of surfaces.

Description

technical field [0001] The present application relates to an inspection system and a corresponding method for determining the state of a substrate carrier or container. Background technique [0002] Such carriers and containers (referred to herein as "containers") for holding substrates such as masks, semiconductor wafers, flat panel displays, or other substrates used in the manufacture of electronic devices typically include typically cuboidal containers The body, one side of the container is set as an opening through which the substrate can be inserted into the container body. Furthermore, the container includes a lid or door member adapted and configured to close the opening, thereby tightly sealing the space within the container body, eg, so that a controlled atmosphere can be provided therein. To provide a tight seal between the container body and the lid, a gasket is provided. The gasket is usually provided on the lid, but may also be provided on the front surface of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/67
CPCH01L21/67288G01N21/9501G06T7/0002G06T2207/30148
Inventor 亚历山大·温德尔
Owner 布鲁克斯自动化(德国)有限公司