Multi-layer feeding box for mask process

Abstract

The invention discloses a multi-layer feeding box for a mask process. The feeding box comprises a feeding box body for the mask process, a box body blocking part is arranged on the front surface of the feeding box body for the mask technology, two lower mask plate containing cavities and two upper mask plate containing cavities are formed in the inner side of the feeding box body for the mask technology, and each lower mask plate containing cavity is located under the corresponding upper mask plate containing cavity. According to the feeding box for the mask technology, the two lower mask plate containing cavities and the two upper mask plate containing cavities are formed in the inner side of the box body of the feeding box for the mask technology, two different types of mask plates can be contained, a plurality of mask plates can be contained at the same time, and the feeding box is simple, practical, safe and reliable.

Description

technical field [0001] The invention belongs to the technical field of mask technology, and in particular relates to a multi-layer feeding box for mask technology. Background technique [0002] A mask is a mold required in the semiconductor industry and integrated circuit production. The pattern on the mask can be copied on the wafer through the exposure process. The mask factory converts the graphic data according to the graphics designed by the customer, and then uses the mask exposure machine to expose on the photosensitive quartz substrate, and develops (baking + developing) and etching processes to make the surface translucent and opaque. very subtle logic graphics. During the mask baking process, the mask substrate is placed on a tray and then put into the oven, and currently the trays used for each type of mask are different. [0003] The tray used for the existing reticle cannot place two different types of reticles, and cannot place multiple reticles at the same t...

AI Technical Summary

Problems solved by technology

[0004] The object of the present invention is to provide a multi-layer material loading box for mask technology, to solve the above-mentioned problem in the background art that the tray used for the existing reticle cannot hold two different types of plates, and cannot place multiple masks at the same time. Templates, the problem of poor practicability

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