A Method of Establishing a Current Source Model for Charge Sharing
A technology for charge sharing and establishing methods, applied in electrical digital data processing, CAD numerical modeling, instruments, etc., can solve the problem that the current source injection model cannot solve the problem of charge sharing, and achieve the effect of solving the problem of charge sharing
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[0025] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0026] 1. The diffusion equation of carriers caused by implanted ions is modeled as:
[0027]
[0028] Among them, Q L =10(LET), D. n Indicates the diffusivity of electrons, D p Represents the diffusivity of holes, r is the diffusion distance, and q is the electron charge. You can refer to "Semiconductor Physics".
[0029] Further there are:
[0030]
[0031] 2. Introduce injection distance r e , that is, the distance from the injection point to the collection point, then in r e The total current at is modeled as:
[0032]
[0033] Among them, D n,p is the carrier diffusivity, I p (t) for figure 1 The total current on the inner equivalent circle.
[0034] 3. Introduce the reference distance r f , the reference distance is the maximum influence distance of ion implantation. Without loss of generality, suppose a collection ...
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