Unlock instant, AI-driven research and patent intelligence for your innovation.

Real-time monitoring of a multi-zone vertical furnace with early detection of a failure of a heating zone element

A technology of hot zone and heating zone, applied in the field of real-time monitoring of heating elements, can solve the problems of camera damage in wafer positioning, furnace overheating, etc., and achieve the effect of minimizing risks

Pending Publication Date: 2020-07-17
X FAB半导体制造有限公司
View PDF7 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If the measured temperature exceeds a threshold preset by the camera 26 located there, the furnace becomes overheated, or the furnace is overheated and the camera used for wafer positioning may be damaged

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Real-time monitoring of a multi-zone vertical furnace with early detection of a failure of a heating zone element
  • Real-time monitoring of a multi-zone vertical furnace with early detection of a failure of a heating zone element
  • Real-time monitoring of a multi-zone vertical furnace with early detection of a failure of a heating zone element

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0043] exist figure 1 The winding, ie the enlarged view of the resistor 1 as a heating coil in wound, planar form is illustrated in . Here the winding contact F should be shown 1 , the winding contact occurs in the region where the winding damage F occurs (in the circle) due to the contact of two adjacent heating wire sections (visible in black and dark).

[0044] The invention described herein, particularly the embodiments described herein, should foresee such damage as occurring damage before it occurs.

[0045]The center of the coil is not shown, which can be assumed to be above, for example at double the height of the picture. This detail is shown in the lower (right) edge region and illustrates such a coil in terms of the resistance 1 in the hot zone 1 ′. A heating wire is generally a piece that is wound outwards around a center in a helical or helical manner.

[0046] exist figure 1 The radially oriented webs visible in bright colors stabilize the position of the ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The aim of the invention is to help avoid wafer losses in thermal treatment. Wafers have values of up to 150,000 euros per batch. Therefore, unplanned failure of the thermal device for treating the wafers should be avoided. The method according to the invention for monitoring the thermal device(s) (100) for receiving and controlling the temperature of wafer lots or batches of wafers uses a continuously applied measurement of a resistance value (R1) in at least one heating zone (1') of a plurality of heating zones (1', 2', 3', 4', 5') of the thermal device. The currently measured value (R1(i))of the resistance (1) in the associated heating zone (1') is compared with a previously measured value (R1(i-1)) of the same resistance (1). A warning or an alarm (90) for the thermal device (100) isalready generated when a deviation (deltaRi) of the two resistance values from the same heating zone (1') is detected by means of the comparison, said warning or alarm occurring temporally before a failure of a whole heating zone (1) of the thermal device (100). Improved ability to plan resources is a further goal.

Description

technical field [0001] The present invention relates to real-time monitoring of heating elements in a multi-zone vertical furnace, such as the five-zone furnace Alpha 8SE from TEL (Tokyo Electron Limited). High temperature results from values ​​above 500°C, which prevail in the thermal device (claim 1) during active operation; cf. equipment data sheet, TEL-Alpha-8SE, August 2004, retrieved September 2017 23rd www.agsemiconductor.com / files / LM28.pdf . Background technique [0002] On the wafer side, US 2010 / 14749 (Turlure, STM) relates to a wafer furnace (page 10 column 3 paragraphs 45, 46 therein) in which a temperature sensor 29 is arranged. If the measured temperature exceeds a threshold value preset by the camera 26 located there, the furnace becomes overheated, or the furnace is overheated and the camera used for wafer positioning may be damaged. It is not intended (and not possible) to detect a fault situation in the furnace for the wafers. [0003] US2009 / 237102A1 (...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): F27B17/00G01R31/28F27D21/00H01L21/67H04M3/08H05B3/14G01R31/54G01R31/72F27D19/00
CPCF27B17/0025F27D21/0014H01L21/67248F27D2019/0025F27D19/00G01R27/08H05B1/0233H01L21/67109H01L21/67288H01L21/67098G01R31/52G01R27/14
Inventor 斯文·格吕贝尔
Owner X FAB半导体制造有限公司