Vertical adsorber and gas purification and adsorption system and method

An adsorber and vertical technology, which is applied in the field of vertical adsorbers and gas purification adsorption systems, can solve the problems to be further improved, and achieve the effects of improving adsorption efficiency and purification effect, ensuring adsorption and purification effect, and having a simple structure.

Pending Publication Date: 2020-08-14
CHINA ENFI ENGINEERING CORPORATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the process of purifying recycled hydrogen still needs to be further improved

Method used

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  • Vertical adsorber and gas purification and adsorption system and method
  • Vertical adsorber and gas purification and adsorption system and method
  • Vertical adsorber and gas purification and adsorption system and method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0075] In this implementation, high-pressure and low-temperature hydrogen containing trace impurities (silicon tetrachloride, trichlorosilane, dichlorodihydrosilane, hydrogen chloride, boride, phosphide) is passed into the adsorber A in the adsorption state to adsorb and separate impurities. Operation, high-pressure low-temperature high-purity hydrogen products can be obtained after adsorption. At the same time, the condensate product and the tail gas rich in boron and phosphorus that need to be discharged are obtained.

[0076] In this example, coconut shell activated carbon adsorbent layers were used in adsorbers A / B / C. Molecular sieve adsorbents are used in boron and phosphorus removal devices. refer to figure 2 , the specific conditions of this embodiment are as follows:

[0077] (1) High-pressure and low-temperature hydrogen raw material S1 (-10°C, 14barg) containing trace impurities (silicon tetrachloride, trichlorosilane, dichlorodihydrosilane, hydrogen chloride, bo...

Embodiment 2

[0089] In this implementation, high-pressure and low-temperature hydrogen containing trace impurities (silicon tetrachloride, trichlorosilane, dichlorodihydrosilane, hydrogen chloride, boride, phosphide) is passed into the adsorber A in the adsorption state to adsorb and separate impurities. Operation, high-pressure low-temperature high-purity hydrogen products can be obtained after adsorption. At the same time, the condensate product and the tail gas rich in boron and phosphorus that need to be discharged can be obtained.

[0090] In this embodiment, the upper adsorbent layer in the adsorber A / B / C uses molecular sieve adsorbent, and the lower adsorbent layer uses coconut shell activated carbon adsorbent. In the boron and phosphorus removal device, activated carbon adsorbent and molecular sieve adsorbent are used in layers. refer to image 3, the specific conditions of this embodiment are as follows:

[0091] (1) High-pressure and low-temperature hydrogen raw material S1 (-...

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Abstract

The invention discloses a vertical adsorber and a gas purification and adsorption system and method. The vertical adsorber comprises a shell, a gas distributor, adsorbent layers and a heat preservation layer arranged on the outer surface of the shell. The gas distributor is arranged in the shell and located between the upper surface and the lower surface of the shell, and the gas distributor comprises a first gas distributor arranged adjacent to the upper surface of the shell and a second gas distributor arranged adjacent to the lower surface of the shell; at least two adsorbent layers are arranged between the first gas distributor and the second gas distributor, a gas redistributor is independently arranged between every two adjacent adsorbent layers, and a hollow interlayer is formed between the upper surface/lower surface of each adsorbent layer and the gas distributor/gas redistributor. The adsorber is simple in structure, easy to design and manufacture, high in adsorption efficiency and good in adsorption effect, and continuous purification of circulating hydrogen in the polycrystalline silicon production process can be achieved and high-purity hydrogen capable of meeting thepolycrystalline silicon production requirement can be obtained by coupling and using a plurality of vertical adsorbers.

Description

technical field [0001] The invention belongs to the field of chemical industry, and in particular relates to a vertical adsorber and a gas purification adsorption system and method. Background technique [0002] There is a large amount of high-purity circulating hydrogen in the polysilicon production process, and the method of purifying these circulating hydrogen is generally adopted by activated carbon adsorption. At present, most activated carbon adsorbers use adsorbers with heat exchange structures. Although the operating cost of the entire device of this type of adsorbers is relatively low, they are usually equipped with tube heat exchange tubes or serpentine heat exchange tubes, and external shells. There is a heat tracing pipe, since the adsorber needs to use external heat and cold to heat and cool the adsorber and the adsorbent, so an additional heat system (hot water / hot oil) and cold system (cold water / cold oil) are required, The control process of the entire adsor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D53/04
CPCB01D53/0407B01D53/0438B01D53/0446B01D53/0454B01D2253/102B01D2253/108B01D2253/116B01D2259/40083B01D2259/4009
Inventor 司文学杨永亮张升学石涛汪绍芬严大洲
Owner CHINA ENFI ENGINEERING CORPORATION
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