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Chemical filter fixing device

A fixed device and filter technology, applied in membrane filters, chemical instruments and methods, fixed filter element filters, etc., can solve the problems of leaking chemicals, smoke, breakage, damage, etc., to reduce the number of working procedures, prevent The effect of chemical leakage and separation work is simple

Pending Publication Date: 2020-09-29
SUBARU TECNICA INTERNATIONAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, in the case where the chemical filter is manually replaced by a worker, chemicals and smoke (FUME) may leak to the outside during the chemical filter replacement work, causing pollution, damage, and breakage not only to the surrounding environment including manufacturing equipment , and other people around, including staff, may also be exposed to the hazard
[0007] In addition, in the case of the staff's valve operation error, various toxic chemicals inside the filter may leak to the outside.
[0008] In addition, since the chemical filter is replaced manually, there is a problem that the number of work steps required to replace the filter increases

Method used

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Embodiment Construction

[0089] Hereinafter, the chemical filter fixing device of the present invention will be described in detail with reference to the drawings.

[0090] refer to figure 1 , The chemical filter automatic replacement device 1 includes: a main body cover 100 , a first door 110 , a second door 120 and a third door 130 arranged in front of the main body cover 100 .

[0091] Such as figure 2 As shown, the main body cover 100 is formed in a hexahedron shape, and the first storage part 210 , the second storage part 220 , the third storage part 230 , the filter assembly installation part 300 , and the filter element replacement tools 400 and 500 can be arranged inside.

[0092] The first storage part 210 is arranged inside the first door 110, the second storage part 220 is arranged inside the second door 120, and the third storage part 220 is arranged inside the third door 130. storage unit 230 .

[0093] In this embodiment, the case where the first storage part 210 and the second stora...

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PUM

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Abstract

The purpose of the present invention is to provide a chemical filter fixing device which can prevent leakage of a chemical by stably fixing a housing and a head of a filter assembly when a chemical filter is automatically replaced. In order to achieve the above purpose, the chemical filter fixing device of the present invention: is to fix a filter assembly (2) comprising a filter housing (20) including a cartridge (10) disposed therein, and a filter head (30) having a plurality of connection parts (31-34) coupled to one open side of the filter housing (20) to allow a chemical to be introducedor discharged; and comprises a filter assembly mounting parts (300, 300-1, and 300-2) to which the filter assembly (2) is mounted so that a contact portion of the filter housing (20) and the filter head (30) comes into close contact with each other by the operation of an operation part.

Description

technical field [0001] The present invention relates to chemical filter fixtures, and more particularly, to chemical filter fixtures that securely secure the housing and head of a filter assembly to prevent chemical leakage. Background technique [0002] In general, various kinds of chemicals are being used in all companies that use hazardous chemicals, such as companies that manufacture semiconductors, semiconductor devices, LCDs, OLEDs, pharmaceutical companies, and paint companies, and the way to safely supply such chemicals is also changing diversification. [0003] This chemical is supplied through a chemical filter, and then the chemical in a high-purity state with minimized impurities is used according to the characteristics of the manufacturing process. [0004] The shape and replacement method of the chemical filter differ depending on the type, and the standard replacement cycle also differs depending on the type of chemical and the required high-purity state main...

Claims

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Application Information

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IPC IPC(8): H01L21/67B01D35/30B01D46/00
CPCB01D29/96B01D2201/4023B01D35/306B01D46/0005H01L21/67017
Inventor 禹泳喆尹炳春宋勇益金荣光
Owner SUBARU TECNICA INTERNATIONAL