Air floatation type micro-force measuring device and friction force compensation method thereof

Abstract

The invention relates to an air floatation type micro-force measuring device and a friction force compensation method thereof. The air floatation type micro-force measuring device comprises an air floatation guide rail, a locking block, a supporting column, a hoop, a high-pressure gas cylinder, a displacement sensor, a needle gauge, a micrometer head and a spring. The air floatation guide rail consists of a guide rail and an air floatation sliding block; in order to reduce the interference of an external gas circuit pipeline on micro-force measurement, the high-pressure gas cylinder and the air floatation sliding block are fixedly connected together through the hoop; the micrometer head is fixedly connected to the supporting column through the locking block. One end of the spring is fixedon the support column and the other end is free; the displacement sensor is placed on the ground, and the needle gauge is fixed on the hoop. When rightward small force acts on the air floatation sliding block, the air floatation sliding block drives the high-pressure gas cylinder to move rightwards together, then the spring is pressed, and the movement amount, namely the compression amount of thespring, of the air floatation sliding block can be obtained through the displacement sensor. As the rigidity of the spring is measured in advance, the magnitude of the micro force acting on the air floatation sliding block can be obtained according to Hooke's law. In order to further improve the measurement precision, the internal friction resistance of the air floatation sliding block needs to becompensated. The guide rail can be inclined by a small angle by adjusting the micrometer head, and the internal friction resistance of the air floatation sliding block can be compensated by the gravity component force, parallel to the guide rail, of parts participating in movement.

Description

technical field [0001] The invention belongs to the field of micro-force measurement and machinery, in particular to an air-floating micro-force measuring device and a friction compensation method thereof. Background technique [0002] Micro-force testing technology is widely used in new materials, MEMS, biomedicine and other fields. The technical level of micro-force measurement affects the progress of the above-mentioned emerging sciences to a certain extent, and is also an important manifestation of a country's scientific research strength. One of the difficulties in micro-force measurement is how to convert the mechanical quantity into a physical quantity that is easier to measure, and how to reduce the measurement error as much as possible during the measurement process. However, in the field of micro-force measurement, mechanical quantities are generally converted into electrical quantities for measurement, and the measurement direction of micro-forces is often limited...

AI Technical Summary

Problems solved by technology

In the field of micro-force measurement, the mechanical quantity is generally converted into electrical quantity for measurement, and the measurement direction of micro-force is often limited to the direction of gravity, and the structure of the measuring equipment is complicated and the cost is high.

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