An air-floating micro-force measuring device and its friction compensation method

Abstract

The invention relates to an air-floating micro-force measuring device and a friction compensating method thereof. Among them, the air-floating guide rail is composed of the guide rail and the air-floating slider; in order to reduce the interference of the external gas pipeline on the micro-force measurement, the clamp connects the high-pressure gas cylinder and the air-floating slider together; the differential head is fixed on the On the support column; one end of the spring is fixed on the support column, and the other end is free; the displacement sensor is placed on the ground, and the needle gauge is fixed on the clamp. When a slight force to the right acts on the air-floating slider, the air-floating slider drives the high-pressure gas cylinder to move to the right together, and then compresses the spring. The displacement sensor can obtain the moving amount of the air-floating slider, that is, the amount of compression of the spring . Since the stiffness of the spring has been measured in advance, the micro force acting on the air bearing slider can be obtained according to Hooke's law. In order to further improve the measurement accuracy, it is necessary to compensate the inherent frictional resistance of the air bearing slider. By adjusting the differential head, the guide rail can be tilted at a slight angle, and the gravity component of the moving parts parallel to the guide rail can compensate the internal frictional resistance of the air bearing slider.

Description

technical field [0001] The invention belongs to the field of micro-force measurement and machinery, in particular to an air-floating micro-force measuring device and a friction compensation method thereof. Background technique [0002] Micro-force testing technology is widely used in new materials, MEMS, biomedicine and other fields. The technical level of micro-force measurement affects the progress of the above-mentioned emerging sciences to a certain extent, and is also an important manifestation of a country's scientific research strength. One of the difficulties in micro-force measurement is how to convert the mechanical quantity into a physical quantity that is easier to measure, and how to reduce the measurement error as much as possible during the measurement process. However, in the field of micro-force measurement, mechanical quantities are generally converted into electrical quantities for measurement, and the measurement direction of micro-forces is often limited...

AI Technical Summary

Problems solved by technology

In the field of micro-force measurement, the mechanical quantity is generally converted into electrical quantity for measurement, and the measurement direction of micro-force is often limited to the direction of gravity, and the structure of the measuring equipment is complicated and the cost is high.

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