Servo control circuit, quartz flexible accelerometer based on servo control circuit and manufacturing method

Abstract

The invention belongs to the technical field of hybrid integrated circuits, and discloses a servo control circuit, a quartz flexible accelerometer based on the servo control circuit and a manufacturing method. The servo control circuit comprises a differential capacitance detector, a current integrator, an RC low-pass filter, a transconductance / compensation amplifier, a resistance-capacitance feedback network and a capacitor; the quartz flexible accelerometer comprises a connection quartz watch head and a servo assembly. The quartz watch head comprises a shell, a pendulous reed, a differentialcapacitance sensor and a torquer are arranged in the shell, the differential capacitance sensor and the torquer are coaxially arranged with the pendulous reed, the servo assembly comprises an outer shell, the outer shell is connected with the shell, a base plate is arranged between the outer shell and the shell, one side of the base plate is connected with the outer shell, and a servo control circuit and a cover plate covering the servo control circuit are arranged on the other side. The shell is provided with a first binding post and a plurality of second binding posts, the first binding post is electroplated with a gold layer, and the first binding post is in bonding connection with a thick film bonding pad connected with the capacitor through gold wires. The defect that an existing quartz flexible accelerometer is poor in anti-interference capacity is overcome, and the measurement precision of the quartz flexible accelerometer is improved.

Description

technical field [0001] The invention belongs to the technical field of hybrid integrated circuits, and relates to a servo control circuit, a quartz flexible accelerometer based on the same and a manufacturing method. Background technique [0002] Inertial navigation technology is an autonomous navigation technology that does not rely on external information and does not radiate external energy. It is continuous and concealed, and it is a carrier motion information perception technology without environmental restrictions. Its basic working principle is based on Newton's laws of mechanics, by measuring the acceleration of the carrier in the inertial reference system, integrating the time, and calculating the speed, yaw angle and position information of the carrier in the navigation coordinate system. As the core instrument of the inertial navigation system, the quality of the accelerometer index directly affects the overall performance of the control system. Among them, the q...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to overcome the shortcomings of the poor anti-interference ability of the quartz flexible accelerometer in the above-mentioned prior art, and provide a servo control circuit and a quartz flexible accelerometer based on it and its manufacturing method

Images