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Optical scanning device, optical measuring apparatus, and robot

A light scanning device, technology of the scanning part, applied in the direction of measuring device, adopting optical device, optics, etc., can solve the problem that the light source is close to the mirror, etc.

Pending Publication Date: 2021-03-05
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, in the device disclosed in Patent Document 1, since the cover glass is arranged between the laser light source and the mirror, it is difficult to bring the light source and the mirror close together, and it is difficult to downsize the device.
Such technical problems are not limited to optical scanning devices, but are also common technical problems in optical measurement devices and robots equipped with optical scanning devices.

Method used

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  • Optical scanning device, optical measuring apparatus, and robot
  • Optical scanning device, optical measuring apparatus, and robot
  • Optical scanning device, optical measuring apparatus, and robot

Examples

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no. 1 approach

[0021] figure 1 It is a figure which shows the schematic structure of the robot 2 in 1st Embodiment of this invention. The robot 2 includes a base 21 , an arm 22 , and an optical measurement device 4 . The optical measurement device 4 is a device for performing three-dimensional measurement of an object W using laser light L. As shown in FIG. In the robot 2, the robot control device 5 is connected to the host computer 6, the robot control device 5 controls the drive of the robot 2 based on the measurement result of the optical measurement device 4, and the host computer 6 and the robot control device 5 can communicate. The robot 2 , the robot control device 5 , the host computer 6 , and the optical measurement device 4 can communicate by wire or wirelessly. Communication may also be via a network such as the Internet.

[0022] The robot 2 is, for example, a robot that performs operations such as feeding, unloading, conveying, and assembling parts. However, the use of the r...

Embodiment approach

[0077] (B-1) In the above embodiment, the distance d3 from the swing axis J of the mirror 451 to the one end 61 of the support portion 460 is shorter than the distance d4 from the swing axis J to the other end 62 of the support portion 460 . However, on the contrary, the distance d3 from the swing axis J to the one end portion 61 may be longer than the distance d4 from the swing axis J to the other end portion 62 of the support portion 460 . Even in this case, since the light source unit 41 includes the tapered portion 46 in the above-described embodiment, interference with the light source unit 41 in the vicinity of the one end portion 61 of the scanning unit 45 can be suppressed.

[0078] (B-2) In the above-described embodiment, the housing 31 of the optical scanning device 30 includes the holding portion 320 that holds the light source unit 41 . However, the holder 320 may also be configured as a separate component from the housing 31 of the optical scanning device 30 . Fo...

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PUM

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Abstract

The invention provides an optical scanning device, an optical measuring apparatus and a robot, the optical scanning device can be miniaturized. The optical scanning device comprises a light source unit having a light exiting portion from which a light is output, a scanning unit having a mirror supported by a supporting part and reflecting the light output from the light exiting portion while swinging the mirror around a swing axis, and a housing having an enclosed space partitioned by a plurality of wall portions including a first wall portion and a second wall portion, in which the light exiting portion and the scanning unit are placed in the enclosed space, wherein the first wall portion transmits the light reflected by the scanning unit, and the second wall portion includes a part of the light source unit.

Description

technical field [0001] The invention relates to an optical scanning device, an optical measuring device and a robot. Background technique [0002] Regarding the optical scanning device, for example, Patent Document 1 discloses a device that scans a surface to be scanned by reflecting laser light with a swingable mirror. In the device disclosed in Patent Document 1, the periphery of the mirror is covered by a package and a cover glass, and the cover glass is disposed between the laser light source and the mirror. Thereby, it becomes the structure which transmits a laser beam through a cover glass, and performs dustproofing. [0003] Patent Document 1: Japanese Patent Laid-Open No. 2019-53331 [0004] However, in the device disclosed in Patent Document 1, since the cover glass is arranged between the laser light source and the mirror, it is difficult to bring the light source and the mirror close together, and it is difficult to downsize the device. Such technical problems ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B26/10G01B11/25B25J9/16B25J9/00
CPCG02B26/105G01B11/254G01B11/2527G01B11/2513B25J9/1697B25J9/1602B25J9/00G01S7/4817G01S17/42G01S17/89G01S7/4814G01S7/4816B25J19/021B25J13/08
Inventor 山贺洋和
Owner SEIKO EPSON CORP