A thermal resistance measuring instrument calibration system
A technology for measuring instruments and calibration systems, applied in the field of semiconductors, can solve problems such as poor consistency and low accuracy of measurement results, and achieve the effect of solving low accuracy
Active Publication Date: 2022-08-02
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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[0004] In view of this, an embodiment of the present invention provides a thermal resistance measuring instrument calibration system to solve the problems of low accuracy and poor consistency of the measurement results of thermal resistance measuring instruments in the prior art
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[0044] In the following description, for the purpose of illustration rather than limitation, specific details such as specific system structures and technologies are set forth in order to provide a thorough understanding of the embodiments of the present invention. However, it will be apparent to those skilled in the art that the present invention may be practiced in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.
[0045] In order to illustrate the technical solutions of the present invention, the following specific embodiments are used for description.
[0046] The embodiment of the present invention provides a thermal resistance measuring instrument calibration system, such as figure 1 As shown, the thermal resistance measuring instrument calibration system 10 includes:
[0047]...
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The invention is applicable to the field of semiconductor technology, and provides a thermal resistance measuring instrument calibration system, comprising: a temperature calibration device, a temperature measurement device, a host computer and a thermal resistance standard part; the temperature calibration device is used to control the thermal resistance standard part to be in a preset state Under the temperature, input the preset test current to the thermal resistance standard part, and measure the first junction voltage of the thermal resistance standard part; After stabilization, measure the second junction voltage of the thermal resistance standard part; the host computer is used to determine the standard thermal resistance value of the thermal resistance standard part according to the preset temperature, the first junction voltage and the second junction voltage, and the standard thermal resistance value is used to The thermal resistance measuring instrument is calibrated. The invention calibrates the thermal resistance measuring instrument by using the thermal resistance standard component that has been calibrated with an accurate thermal resistance value, and can solve the problems of low accuracy and poor consistency of the measurement results of the thermal resistance measuring instrument in the prior art.
Description
technical field [0001] The invention belongs to the technical field of semiconductors, and in particular relates to a thermal resistance measuring instrument calibration system. Background technique [0002] Thermal resistance parameters are important parameters to characterize the heat dissipation performance of semiconductor devices, which are directly related to the life and reliability of semiconductor devices. With the development of semiconductor devices toward miniaturization, high power, and high integration, the importance of accurately testing thermal resistance parameters continues to increase. [0003] At present, most of the thermal resistance measuring instruments on the market are based on the electrical measurement principle, measure the junction temperature of the semiconductor device by the small current K coefficient method, and then calculate the thermal resistance of the semiconductor device. However, in this method, due to the switching between the work...
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IPC IPC(8): G01K15/00
CPCG01K15/00
Inventor 李灏刘岩乔玉娥荆晓冬丁立强任宇龙杜蕾
Owner THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP