A thermal resistance measuring instrument calibration method and device based on thermal resistance standard parts
A technology of measuring instruments and calibration methods, which is applied in the direction of measuring devices, instruments, and measuring electrical variables, etc., can solve problems such as poor consistency and low accuracy of measurement results, and achieve the effect of solving low accuracy of measurement results
Active Publication Date: 2022-08-05
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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[0004] In view of this, an embodiment of the present invention provides a thermal resistance measuring instrument calibration method and device based on thermal resistance standard parts, to solve the problems of low accuracy and poor consistency of measurement results of thermal resistance measuring instruments in the prior art
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[0050] In the following description, for the purpose of illustration rather than limitation, specific details such as specific system structures and technologies are set forth in order to provide a thorough understanding of the embodiments of the present invention. However, it will be apparent to those skilled in the art that the present invention may be practiced in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.
[0051] In order to illustrate the technical solutions of the present invention, the following specific embodiments are used for description.
[0052] A first aspect of the embodiments of the present invention provides a method for calibrating a thermal resistance measuring instrument based on a thermal resistance standard component, refer to figure 1 As shown, the method...
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The present invention is suitable for semiconductor technology fields, which provides a thermal resistance measurement instrument calibration method and device based on thermal resistance standard parts.Test the current and measure the first -end voltage of the thermal resistance standard component, determine the school temperature curve of the thermal resistance standard component according to the preset temperature and the first -end voltage;After the knot temperature is stable, measure the second knot voltage of the thermal resistance standard. Based on the school temperature curve and the second nodular voltage, determine the knot temperature of the thermal resistance standard parts at the preset working current, and determine the thermal resistance standard according to the knot temperature.The standard thermal resistance value of the piece; calibrate the thermal resistance measurement instrument according to the standard thermal resistance.The present invention uses the thermal resistance of the accurate heat resistance value to calibrate the thermal resistance measurement instrument, which can solve the problem of low accuracy and poor consistency of thermal measurement instruments in the existing technology.
Description
technical field [0001] The invention belongs to the technical field of semiconductors, and in particular relates to a method and device for calibrating a thermal resistance measuring instrument based on a thermal resistance standard component. Background technique [0002] Thermal resistance parameters are important parameters to characterize the heat dissipation performance of semiconductor devices, which are directly related to the life and reliability of semiconductor devices. With the development of semiconductor devices toward miniaturization, high power, and high integration, the importance of accurately testing thermal resistance parameters continues to increase. [0003] At present, most of the thermal resistance measuring instruments on the market are based on the electrical measurement principle, measure the junction temperature of the semiconductor device by the small current K coefficient method, and then calculate the thermal resistance of the semiconductor devic...
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IPC IPC(8): G01R35/00
CPCG01R35/00
Inventor 郑世棋李灏翟玉卫丁晨刘霞美程晓辉范雅洁
Owner THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP