Thermal resistance measuring instrument calibration system
A technology for measuring instruments and calibration systems, applied in the field of semiconductors, can solve the problems of low accuracy and poor consistency of measurement results, and achieve the effect of avoiding junction voltage spikes and solving low accuracy.
Active Publication Date: 2021-03-19
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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[0004] In view of this, an embodiment of the present invention provides a thermal resistance measuring instrument calibration system to solve the problems of low accuracy and poor consistency of the measurement results of thermal resistance measuring instruments in the prior art
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[0044] In the following description, specific details such as specific system structures and technologies are presented for the purpose of illustration rather than limitation, so as to thoroughly understand the embodiments of the present invention. It will be apparent, however, to one skilled in the art that the invention may be practiced in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.
[0045] In order to illustrate the technical solutions described in the present invention, specific examples are used below to illustrate.
[0046] The embodiment of the present invention provides a thermal resistance measuring instrument calibration system, such as figure 1 As shown, the thermal resistance measuring instrument calibration system 10 includes:
[0047] Thermal resistance standard ...
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The invention is applicable to the technical field of semiconductors and provides a thermal resistance measuring instrument calibration system. The system comprises a temperature calibration device, atemperature measurement device, an upper computer and a thermal resistance standard component, wherein the temperature calibration device is used for controlling the thermal resistance standard component to be at a preset temperature, inputting a preset test current to the thermal resistance standard component and measuring a first junction voltage of the thermal resistance standard component; the temperature measuring device is used for inputting a preset working current to the thermal resistance standard part and measuring a second junction voltage of the thermal resistance standard part after the junction temperature of the thermal resistance standard part is stable; the upper computer is used for determining the standard thermal resistance value of the thermal resistance standard partaccording to the preset temperature, the first junction voltage and the second junction voltage, and the standard thermal resistance value is used for calibrating the thermal resistance measuring instrument. According to the system, the thermal resistance measuring instrument is calibrated by using the thermal resistance standard component with the calibrated accurate thermal resistance value, soproblems of low accuracy and poor consistency of the measurement result of the thermal resistance measuring instrument in the prior art can be solved.
Description
technical field [0001] The invention belongs to the technical field of semiconductors, and in particular relates to a thermal resistance measuring instrument calibration system. Background technique [0002] Thermal resistance parameters are important parameters to characterize the heat dissipation performance of semiconductor devices, which are directly related to the life and reliability of semiconductor devices. With the development of semiconductor devices towards miniaturization, high power, and high integration, the importance of accurately testing thermal resistance parameters continues to increase. [0003] At present, most of the thermal resistance measuring instruments on the market are based on the electrical measurement principle, and measure the junction temperature of the semiconductor device by the small current K coefficient method, and then calculate the thermal resistance of the semiconductor device. However, in this method, due to the switching between the...
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IPC IPC(8): G01K15/00
CPCG01K15/00
Inventor 李灏刘岩乔玉娥荆晓冬丁立强任宇龙杜蕾
Owner THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP