Polarizer

Abstract

The invention relates to the technical field of microwaves, and provides a polarizer. The polarizer comprises a reversing elbow and a polarization mirror, wherein two microwave channels which communicate with each other are arranged in the reversing elbow; the reversing elbow comprises a mounting surface used for arranging the polarization mirror; a groove is formed in the mounting surface; a through hole which communicates with a connecting inflection point of the two microwave channels is formed in the middle of the groove; the polarization mirror is partially or completely arranged in the groove; the front surface of the polarization mirror covers the through hole, and the back surface of the polarization mirror is provided with a deflector rod; a cover plate is arranged at an opening of the groove and is connected with the mounting surface; an adjusting hole for the deflector rod to extend out is formed in the cover plate; and the deflector rod rotates or slides relative to the adjusting hole so as to allow the polarization mirror to rotate in the groove; According to the invention, a microwave polarization angle is accurately adjusted, and efficient coupling of microwaves and plasmas is achieved.

Description

technical field [0001] The invention belongs to the field of microwave technology, in particular to a polarizer. Background technique [0002] In electron cyclotron resonance heating systems, microwaves reaching the resonant layer require specific microwave polarization forms to carry out ordinary mode or extraordinary mode heating. The ratio of ordinary mode and extraordinary mode depends on the microwave polarization form and incident angle. When changing the plasma operating parameters or microwave incident angle, the microwave polarization form must be changed to achieve efficient coupling between the wave and the plasma. In the process of wave transmission, it is necessary to use a polarizer to change the polarization direction of the microwave so that it hits the plasma in the specified direction. The polarization direction is of great significance for the coupling of microwave and plasma. Microwaves with different polarization directions have different propagation tr...

AI Technical Summary

Problems solved by technology

[0003] The polarizing mirror in the polarizer in the prior art has two control modes: manual control and mechanical automation control, but the response speed of the manual control mode is slow and the precision is low, so that the efficient coupling of the wave and the plasma cannot be guaranteed; the automatic control Although the method has fast response and high precision, its adjustment structure is more complicated and the installation accuracy is higher. Once a problem occurs, it needs to be re-adjusted and the maintenance cycle is longer. The complex structure makes maintenance more difficult and reduces work efficiency.

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