Method for adding gas selection function of multifunctional gas sensor and gas sensor

Abstract

The invention discloses a method for adding a gas selection function of a multifunctional gas sensor and the gas sensor. The method for adding the gas selection function of the multifunctional gas sensitive sensor comprises the step of forming a nano noble metal particle modification layer on the surface of a semiconductor gas sensitive material layer of a probe of the gas sensitive sensor, so that the single probe of the gas sensitive sensor can realize selective detection on at least three gases in a working temperature range of 0-400 DEG C. According to the method for adding the gas selection function of the multifunctional gas sensitive sensor, the surface of the semiconductor gas sensitive material layer is modified by using the nano noble metal particles, so that the gas selectivity of the gas sensitive sensor is improved, the types of selected gases are expanded, and selective detection of at least three gases within the working temperature range of 0-400 DEG C can be realized; and a new scheme and a new way are provided for preparing the multifunctional gas sensitive sensor with more gas selection functions.

Description

technical field [0001] The present application relates to the technical field of gas sensors, in particular to a method for increasing the gas selection function of a multifunctional gas sensor and the gas sensor. Background technique [0002] As the foundation and key functional unit of the Internet of Things and artificial intelligence, sensors are considered to be one of the three pillars of modern information technology. Gas sensors play an important role in industrial manufacturing, environmental monitoring, drug diagnosis, personal safety, etc. Semiconductor-based resistive gas sensors have the advantages of small size, simple structure, high response, and low price. [0003] The principle of semiconductor resistive gas sensor to detect gas is that the gas is adsorbed and chemically reacted on its surface, so it responds to a variety of gases, but the working environment for gas detection is generally more complicated, and the single-probe gas sensor is used in multi-...

AI Technical Summary

Problems solved by technology

However, this type of device is not a single-probe device, and has problems such as large volume, complex structure, time-consuming and cumbersome testing process and data processing.

[0006] In summary, the existing gas sensors, especially those with a single probe, can only achieve dual-function gas selectivity at most, that is, they can only pass through Temperature control enables the gas sensor to detect two gases; moreover, this method of achieving dual-function gas selectivity through temperature control has a large range of temperature control, and there are a series of safety hazards and hazards in increasing the operating temperature of the device. Defects in energy consumption

At present, there is no research and report on the gas sensor with a single probe that can realize the function of selecting more than two gases

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