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Semiconductor mach zehnder optical modulator

A semiconductor and modulator technology, applied in the field of semiconductor Mach-Zehnder optical modulators, can solve problems such as the deterioration of modulation characteristics, achieve smooth modulation characteristics, high baud rate operation, and suppress the deterioration of phase modulation characteristics.

Pending Publication Date: 2021-08-27
NIPPON TELEGRAPH & TELEPHONE CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, especially in the case where the above-mentioned open-collector type or open-drain type driver is connected to the MZM, the modulation characteristic will deteriorate due to the influence of the reflected wave

Method used

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  • Semiconductor mach zehnder optical modulator
  • Semiconductor mach zehnder optical modulator
  • Semiconductor mach zehnder optical modulator

Examples

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Embodiment

[0047] figure 1 is a plan view illustrating the configuration of an IQ modulator according to an embodiment of the present invention. The IQ modulator includes input waveguide 10, 1×2 multimode interface (MMI) coupler 11, waveguides 12 and 13, 1×2 MMI coupler 14, 1×2 MMI coupler 15, waveguides 16 and 17 (first arm waveguides and second arm waveguide), waveguides 18 and 19 (first arm waveguide and second arm waveguide), input-side lead-out lines 20 and 21 (first input-side lead-out line and second input-side lead-out line), input-side lead-out line 22 and 23 (first input side lead-out line and second input side lead-out line), phase modulation electrode lines 24 and 25 (first phase modulation electrode line and second phase modulation electrode line), phase modulation electrode lines 26 and 27 (the second A phase modulation electrode line and a second phase modulation electrode line), output-side lead-out lines 28 and 29 (first output-side lead-out line and second output-side ...

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Abstract

The present invention addresses the problem of deterioration of high-frequency characteristics of an optical modulator arising from inconsistent impedance between a high-frequency line and a terminal resistor. Provided is a semiconductor Mach Zehnder optical modulator comprising: input-side lead lines 20-32; phase modulation electrode lines 24-27; output-side lead lines 28-31; electrodes 32-35 which respectively apply modulation signals propagated through the phase modulation electrode lines 24-27 to waveguides 16-19; and ground lines 48-50. Furthermore, at least one of either a n-type semiconductor layer or a p-type semiconductor layer is successively formed between a lower layer substrate of the output-side lead lines 28-31 and a dielectric layer so as to follow along the output-side lead lines 28-31.

Description

technical field [0001] The invention relates to a semiconductor Mach-Zehnder optical modulator for modulating an optical signal with an electrical signal. Background technique [0002] High-speed optical modulators supporting advanced optical modulation schemes are required to respond to ever-increasing traffic demands. In particular, multilevel optical modulators using digital coherent technology play a major role in enabling high-capacity transceivers with capacities exceeding 100 Gbps. These multilevel optical modulators are configured to include Mach-Zehnder (Mach-Zehnder) interference type Mach-Zehnder optical modulators (Mach-Zehnder modulators) arranged in a parallel and multi-level manner capable of zero-chirp driving. , hereinafter referred to as MZM), in order to add an independent signal to the amplitude and phase of the light. [0003] In recent years, miniaturization of optical transmitter modules and reduction of driving voltage are challenges, and research a...

Claims

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Application Information

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IPC IPC(8): G02F1/025
CPCG02F2203/50G02F1/212G02F1/025G02F1/2255G02F1/2257
Inventor 尾崎常祐田野边博正金泽慈
Owner NIPPON TELEGRAPH & TELEPHONE CORP
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