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Mask frame integration, carrier for mask frame and method of handling a mask

A carrier, mask technology, applied in the field of mask frame integration, carrier for mask frame and for processing masks, which can solve problems such as damage

Pending Publication Date: 2021-10-19
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Consider in e.g. 1m 2 For alignment in the micron range over large areas, the gravitational force exerted on the mask, including the mask frame and reticle, can damage the alignment by changing the orientation of the mask

Method used

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  • Mask frame integration, carrier for mask frame and method of handling a mask
  • Mask frame integration, carrier for mask frame and method of handling a mask
  • Mask frame integration, carrier for mask frame and method of handling a mask

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Embodiment Construction

[0025] Reference will now be made in detail to various embodiments, one or more examples of which are illustrated in the accompanying drawings. Each example is provided by way of illustration and not meant as a limitation. Furthermore, features illustrated or described as part of one embodiment can be used on or in conjunction with any other embodiment to yield a still further embodiment. The present disclosure is intended to cover such modifications and variations.

[0026] In the following description of the drawings, the same reference numerals refer to the same or similar elements. In general, only the differences with respect to individual implementations are described. Unless otherwise stated, the description of a component or aspect in one embodiment is also applicable to the corresponding component or aspect in another embodiment.

[0027] For vertical OLED evaporation especially during fabrication of RGB OLED devices, masks for pixel generation of organic materials...

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Abstract

A carrier for a mask is described. The carrier includes a carrier body having a surface configured to face at least a portion of the mask, the carrier body having an opening for material deposition; and a magnetic holding arrangement having one or more magnetic holders arranged at the carrier body around the opening of the carrier body.

Description

technical field [0001] Embodiments of the present disclosure relate to mask frame integration for vertical organic light emitting diode (OLED) evaporation, methods of processing masks under vacuum in a vacuum system, and in particular to processing configured for use in A method of mask-depositing a mask of evaporated material on a substrate in a vacuum system. More particularly, embodiments and implementations of the present disclosure relate to carriers for masks, mask processing modules, methods of loading masks on mask carriers, and aligning masks relative to substrates in processing chambers Methods. Background technique [0002] Optoelectronic devices using organic materials are becoming increasingly popular for a number of reasons. Most of the organic materials used to fabricate these devices are relatively inexpensive, giving organic optoelectronic devices the potential for cost advantages over inorganic devices. The inherent properties of organic materials can be...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/677H01L51/56H01L21/687
CPCH01L21/681H01L21/682H01L21/67718H01L21/67709H01L21/67751H01L21/68742H10K71/00
Inventor 黄荣周李相喆金官希李汀珉金大用栗田真一池正敏
Owner APPLIED MATERIALS INC