Gas supply device and sealing gasket replacement method of gas supply device

Abstract

The purpose of the present invention is to provide a gas supply device and a sealing gasket replacement method capable of preventing double insertion of a gasket due to adhesion of the gasket to a valve connector of a container. The sealing gasket replacement method of a gas supply device according to the present invention comprises the steps of: a) placing a sealing gasket between a valve connector provided in a container and a connection piping connector connected to a gas demand site to couple the valve connector and the connection piping connector; b) releasing the coupling of the valve connector and the connecting piping connector; and c) transferring the sealing gasket after separating the sealing gasket from between the valve connector and the connecting piping connector, wherein the process of performing the steps a) to c) includes a process in which the sealing gasket is gripped by a sealing gasket gripper and the sealing gasket gripper gripping the sealing gasket and the connecting piping connector are simultaneously transferred.

Description

technical field [0001] The present invention relates to a gas supply device and a gasket replacement method, and more particularly, to a gas supply device and a gasket replacement method capable of preventing the gasket from coming off and from a situation where the gasket is stuck to a valve connector of a container. Background technique [0002] In general, for devices that supply gas to devices using gas (particularly, where gas is demanded for fine operations such as semiconductor equipment, etc.), types of gas suitable for various purposes are required to satisfy predetermined concentrations, pressures, and the like. [0003] In order to efficiently supply such gases, many kinds of gases are kept under high pressure. In particular, gases with harmful properties such as flammability, toxicity, and corrosion are strictly managed in separate spaces separated from humans. [0004] The gas storage container (hereafter, simply referred to as "container") for storing gas is co...

AI Technical Summary

Problems solved by technology

[0006] As mentioned above, in the case where the gasket sticks to the valve connector, there is no additional mechanism to sense this, and in order to confirm the seal with a sensing sensor or the like Whether the pad is bonded or not requires additional parts, and therefore there is a problem that the manufacturing cost of the device increases

[0007] If the gasket for the valve connector is still bonded, join the piping connector after bonding a new gasket to the connecting piping connector and valve connector, since two gaskets (existing gasket and new gasket) are inserted between the connecting pipe connector and the valve connector in a double-insert manner, it may occur that airtightness cannot be maintained. gas leak accident

[0008] And, transfer the connection piping connector in the state where the new gasket is connected to the connection piping connector and connect the connection piping connector to the valve connector, During the transfer of the connecting pipe connector, there may be a problem that the new gasket may be detached from the connecting pipe connector

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